{"id":"W2119075659","doi":"10.1557/proc-715-a12.6","title":"Amorphous Silicon Vertical Thin Film Transistor for High Density Integration","year":2002,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Photoresist; Reactive-ion etching; Fabrication; Dry etching; Optoelectronics; Masking (illustration); Amorphous silicon; Amorphous solid; Silicon; Etching (microfabrication); Thin-film transistor; Transistor; Nanotechnology; Crystalline silicon; Electrical engineering; Layer (electronics); Crystallography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009111682,0.0002296553,0.0002495263,0.0001209729,0.00009653932,0.00005548412,0.0002254233,0.000211966,0.00006212006],"category_scores_gemma":[0.0001311372,0.0002293359,0.00009504169,0.0001959423,0.00008619759,0.0002659666,0.00001069305,0.0002900874,0.00004921835],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001950915,"about_ca_system_score_gemma":0.000003772356,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002511677,"about_ca_topic_score_gemma":0.00003557259,"domain_scores_codex":[0.9989609,0.000002088811,0.0002512556,0.0002743294,0.0001699503,0.0003415444],"domain_scores_gemma":[0.9996658,0.00003587556,0.00001759228,0.0001218705,0.00009301058,0.00006586832],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001453288,0.0002163585,0.0007463618,0.0008215545,0.0001589099,0.00001242221,0.007618831,0.001032968,0.8029193,0.02369751,0.134929,0.02770146],"study_design_scores_gemma":[0.001087432,0.0002324925,0.003635813,0.00008829317,0.0001196664,0.0000250493,0.0004934533,0.1668572,0.8162003,0.002571436,0.007982679,0.0007062017],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9876308,0.0002522241,0.006801928,0.000700577,0.0004165422,0.000407369,0.00001394795,0.002769869,0.001006758],"genre_scores_gemma":[0.9953095,0.00003371509,0.004157128,0.0000813791,0.00007583754,0.0001039453,0.000005621302,0.00005937256,0.0001734401],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1658243,"threshold_uncertainty_score":0.9352049,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01410477920746505,"score_gpt":0.1884334047351051,"score_spread":0.17432862552764,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}