{"id":"W2119163471","doi":"10.1149/1.1371255","title":"Fabrication of Perforated Thin Films with Helical and Chevron Pore Shapes","year":2001,"lang":"en","type":"article","venue":"Electrochemical and Solid-State Letters","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":36,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Photoresist; Fabrication; Thin film; Etching (microfabrication); Perforation; Composite material; Deposition (geology); Silicon; Chevron (anatomy); Isotropic etching; Optics; Nanotechnology; Optoelectronics; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000195584,0.0004243333,0.0003666546,0.0002812336,0.0002183884,0.0006102467,0.0008009635,0.0007247132,0.001137936],"category_scores_gemma":[0.0005826512,0.0006351174,0.0003165664,0.0002538679,0.0002523202,0.0004363366,0.0003892252,0.0007565503,0.0005653495],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002620144,"about_ca_system_score_gemma":0.0001411244,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002534643,"about_ca_topic_score_gemma":0.0005101038,"domain_scores_codex":[0.9998187,0.00001229644,0.00001781084,0.00004265534,0.00006912199,0.00003949992],"domain_scores_gemma":[0.9996824,0.00006611782,0.00008248798,0.00006893575,0.00004415643,0.00005582736],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001379705,0.000007508936,0.00007345299,0.00005765814,0.000008978701,0.0001394595,0.00002853215,0.0001780113,0.9969945,0.0002249641,0.00007926876,0.002193804],"study_design_scores_gemma":[0.00001799312,0.00008343685,0.000771774,0.000008078863,0.000013474,0.0004993328,0.00002172814,0.0008787553,0.9953492,0.0000899168,0.002253321,0.00001284534],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9477729,0.002818964,0.04134582,0.0002360193,0.0001930818,0.0001842019,0.0008679482,0.0007455542,0.005835576],"genre_scores_gemma":[0.90176,0.003098907,0.09068649,0.000184283,0.00003835664,0.0001675899,0.0008234451,0.0001397408,0.00310109],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001137936,"threshold_uncertainty_score":0.00380677,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005550627191864078,"score_gpt":0.2157848213943121,"score_spread":0.210234194202448,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}