{"id":"W2119163471","doi":"10.1149/1.1371255","title":"Fabrication of Perforated Thin Films with Helical and Chevron Pore Shapes","year":2001,"lang":"en","type":"article","venue":"Electrochemical and Solid-State Letters","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":36,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Photoresist; Fabrication; Thin film; Etching (microfabrication); Perforation; Composite material; Deposition (geology); Silicon; Chevron (anatomy); Isotropic etching; Optics; Nanotechnology; Optoelectronics; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001223567,0.0001410292,0.0002086555,0.00002738171,0.00008106468,0.00005707713,0.00008190746,0.00005090438,0.00005993331],"category_scores_gemma":[0.00005507946,0.0001008671,0.00001931097,0.0001380295,0.0002137418,0.0001207544,0.00003807868,0.0001443418,0.00000386785],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001080513,"about_ca_system_score_gemma":0.00001332565,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002428816,"about_ca_topic_score_gemma":0.000004009141,"domain_scores_codex":[0.9990031,0.00002274822,0.000211798,0.000290408,0.000173471,0.000298524],"domain_scores_gemma":[0.9996008,0.00006342964,0.0000879091,0.00007580971,0.00006575217,0.0001062612],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000114487,0.00002463405,0.000967944,0.00002703146,0.000005146229,0.000005014932,0.0002920518,0.00000752843,0.9979594,0.00008483876,0.0002589869,0.0002528928],"study_design_scores_gemma":[0.0004076659,0.0002701803,0.002133201,0.00003540752,0.0000174106,0.00004987918,0.00005320233,0.004873098,0.991448,0.0003379339,0.0001775378,0.0001964389],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9959843,0.00006261576,0.001307737,0.002372982,0.000007965405,0.00009771743,0.00000346293,0.00003912758,0.000124137],"genre_scores_gemma":[0.9959056,0.00003947108,0.002560892,0.001362031,0.00003249767,0.000008692266,0.00001573392,0.00001127476,0.00006376007],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.006511399,"threshold_uncertainty_score":0.4113241,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005550627191864078,"score_gpt":0.2157848213943121,"score_spread":0.210234194202448,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}