{"id":"W2119828410","doi":"10.1109/aim.2010.5695779","title":"Sliding mode tracking control of an electrostatic parallel-plate MEMS","year":2010,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal","funders":"","keywords":"Control theory (sociology); Sliding mode control; Parametric statistics; Tracking (education); Microelectromechanical systems; Computer science; Position (finance); Power (physics); Electronic circuit; Range (aeronautics); Engineering; Control (management); Materials science; Nonlinear system; Physics; Electrical engineering; Mathematics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001890161,0.0002526779,0.0001468592,0.000113445,0.0001856186,0.0002862167,0.0003106451,0.0002286743,0.001017649],"category_scores_gemma":[0.0003338979,0.00009899892,0.0001323573,0.00009174841,0.0003072954,0.0001873105,0.0002430455,0.0002115107,0.0001290443],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00015942,"about_ca_system_score_gemma":0.0002354939,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008946203,"about_ca_topic_score_gemma":0.0006598208,"domain_scores_codex":[0.9999328,0.00001010059,0.0000033934,0.00001510954,0.00003274083,0.000005881129],"domain_scores_gemma":[0.9999212,0.00002788271,0.00001532484,0.000008366433,0.00002203917,0.000005105467],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.000291497,0.0001228626,0.0008758477,0.0002091604,0.00005614346,0.0003684548,0.000207073,0.5149003,0.332438,0.01743931,0.0009295907,0.1321618],"study_design_scores_gemma":[0.00001750832,0.0001438255,0.000291131,0.00000359339,0.000007444009,0.00002718857,0.000006437328,0.9767892,0.02095362,0.0008983733,0.0008561819,0.000005539156],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2543232,0.0002581008,0.7353565,0.0001742172,0.0001090412,0.00007504816,0.00003145348,0.0005106449,0.009161687],"genre_scores_gemma":[0.9730786,0.0001041543,0.02328978,0.00002124652,0.00001324809,0.00003857711,0.00001423235,0.000007561128,0.003432545],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001017649,"threshold_uncertainty_score":0.003404438,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007641270943754239,"score_gpt":0.2412233443066855,"score_spread":0.2335820733629313,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}