{"id":"W2120154505","doi":"10.1109/mwsym.2004.1339060","title":"A novel MEMS LTCC switch matrix","year":2004,"lang":"en","type":"article","venue":"","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":33,"is_retracted":false,"has_abstract":true,"ca_institutions":"COM DEV International","funders":"University of Waterloo","keywords":"Microelectromechanical systems; Materials science; Interconnection; Crossbar switch; Substrate (aquarium); Planar; Ceramic; Matrix (chemical analysis); Optoelectronics; Electronic engineering; Electrical engineering; Computer science; Engineering; Telecommunications; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008121439,0.0003616633,0.000198038,0.0002238368,0.0002697231,0.0004939787,0.0005752679,0.0004058157,0.003356062],"category_scores_gemma":[0.0001335917,0.0001529008,0.0002403276,0.0002244386,0.0001383231,0.0003862193,0.0002569119,0.0003410966,0.0008925203],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003020816,"about_ca_system_score_gemma":0.0003240658,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009020319,"about_ca_topic_score_gemma":0.001221601,"domain_scores_codex":[0.9998561,0.000009205294,0.000005160468,0.00002607606,0.00008040192,0.00002300522],"domain_scores_gemma":[0.9998884,0.00001188953,0.00002482236,0.00001517165,0.00003620519,0.00002342975],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000362538,0.00001929927,0.0002249175,0.00005077184,0.00001043771,0.0001592492,0.00001670324,0.001115749,0.9871616,0.001282513,0.0008635087,0.009058983],"study_design_scores_gemma":[0.00004655374,0.0006280006,0.002738717,0.000009513782,0.00005360163,0.001051187,0.00003707116,0.0204859,0.9234685,0.0006038994,0.05084171,0.00003529429],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8213651,0.002294487,0.1219225,0.000652406,0.0009609792,0.0002720922,0.001050253,0.004008384,0.04747386],"genre_scores_gemma":[0.9058422,0.0005531862,0.07790031,0.0001148451,0.000126056,0.0001276677,0.0005355123,0.00007735969,0.01472289],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003356062,"threshold_uncertainty_score":0.01122719,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009674603285278579,"score_gpt":0.2132636487686038,"score_spread":0.2035890454833253,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}