{"id":"W2120594247","doi":"10.1016/j.actamat.2008.06.007","title":"PECVD low-permittivity organosilicate glass coatings: Adhesion, fracture and mechanical properties","year":2008,"lang":"en","type":"article","venue":"Acta Materialia","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":59,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"Harvard School of Engineering and Applied Sciences; Semiconductor Research Corporation","keywords":"Materials science; Composite material; Adhesion; Fracture (geology); Silicon nitride; Stiffness; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002486256,0.0002640175,0.0001972134,0.0002773085,0.0002355754,0.0003272288,0.0003287127,0.0005628979,0.0007789151],"category_scores_gemma":[0.0004689439,0.0003263595,0.000199473,0.0002803529,0.0002951369,0.0002409457,0.0001650982,0.0004017726,0.0002017495],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000257115,"about_ca_system_score_gemma":0.0001319119,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001506776,"about_ca_topic_score_gemma":0.002573517,"domain_scores_codex":[0.9997784,0.0000174805,0.00001108952,0.00003043945,0.0001064299,0.00005608889],"domain_scores_gemma":[0.9997124,0.00008071409,0.00005817294,0.00003749028,0.00008843859,0.0000227387],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001235984,0.00001923541,0.0006007481,0.00002810451,0.000007501968,0.00006374891,0.00002755556,0.000170271,0.9968382,0.00003142457,0.00005269595,0.002036939],"study_design_scores_gemma":[0.000007701036,0.0002160121,0.008670697,0.000003389356,0.000013426,0.0001009756,0.00004038307,0.0008541877,0.9897683,0.00001605008,0.0003035437,0.0000053723],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.997401,0.001204652,0.0005750927,0.000019882,0.00001488851,0.000004256398,0.00004986897,0.000009132318,0.0007211996],"genre_scores_gemma":[0.9972199,0.0005241515,0.0006364536,0.00001575114,0.000007425971,0.000003833609,0.0001037515,0.00000864265,0.00148005],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001506776,"threshold_uncertainty_score":0.002996087,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02077567065390722,"score_gpt":0.2287376467655254,"score_spread":0.2079619761116182,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}