{"id":"W2120724999","doi":"10.1117/1.3506744","title":"Pressure sensing in vacuum hermetic micropackaging for MOEMS-MEMS","year":2010,"lang":"en","type":"article","venue":"Journal of Micro/Nanolithography MEMS and MOEMS","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National d'Optique","funders":"","keywords":"Bolometer; Calibration; Microelectromechanical systems; Torr; Sensitivity (control systems); Pressure measurement; Pressure sensor; Materials science; Optoelectronics; Electrical engineering; Electronic engineering; Engineering; Mechanical engineering; Physics; Detector","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.000416311,0.0003031966,0.0005299582,0.0006886095,0.00009214452,0.00007660305,0.0002226276,0.0002666701,0.00000432527],"category_scores_gemma":[0.00004924839,0.0002618356,0.000241589,0.0003662964,0.0001452666,0.0002726314,0.00004384047,0.0007929613,6.177048e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001497317,"about_ca_system_score_gemma":0.0000225801,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001328208,"about_ca_topic_score_gemma":0.00005447927,"domain_scores_codex":[0.9984873,0.000006366593,0.0006156427,0.0002262029,0.0001442846,0.0005202016],"domain_scores_gemma":[0.9991717,0.00009770211,0.0002073274,0.0002560253,0.0001381386,0.0001291192],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003245811,0.00003943367,0.000733263,0.0001354306,0.00009478471,0.00003213265,0.000227756,0.000102059,0.9780341,0.00005622446,0.000408471,0.02010384],"study_design_scores_gemma":[0.002572093,0.000356933,0.01166789,0.0004438106,0.0001671361,0.001169453,0.0007155499,0.000469301,0.846236,0.005495182,0.1299183,0.0007883578],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9878683,0.008287988,0.002000714,0.0001399261,0.001197477,0.0002618717,0.00001882421,0.00011295,0.0001119558],"genre_scores_gemma":[0.9709162,0.00206247,0.02658738,0.00003740378,0.0002627624,0.000006068309,0.000001598389,0.00006825253,0.00005793595],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1317982,"threshold_uncertainty_score":0.9999834,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005236010907464918,"score_gpt":0.2169049482409304,"score_spread":0.2116689373334655,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}