{"id":"W2121341028","doi":"10.1109/cicc.2008.4672054","title":"Frequency tunable silicon carbide resonators for MEMS above IC","year":2008,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University","funders":"","keywords":"Microelectromechanical systems; Resonator; Materials science; Silicon carbide; Fabrication; Optoelectronics; Silicon; Surface micromachining; CMOS; Electronic engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00003054507,0.0001204652,0.0001409544,0.00006493021,0.00006830071,0.000005047966,0.0001178456,0.0001054036,0.000040733],"category_scores_gemma":[0.00004572975,0.000107447,0.00005159209,0.0001189205,0.00004187937,0.0001223088,0.00001608398,0.0001008504,0.00002184797],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005343203,"about_ca_system_score_gemma":0.0000104885,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000727769,"about_ca_topic_score_gemma":0.00004906241,"domain_scores_codex":[0.9993877,6.35636e-7,0.0001334828,0.0001408591,0.00006618194,0.000271126],"domain_scores_gemma":[0.9996651,0.0000408267,0.00001269985,0.0002190748,0.00002432695,0.00003790937],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000004691631,0.00001893736,0.0004168665,0.00007190547,0.00003881297,0.00002267104,0.0001505436,0.001193342,0.9596491,0.01424635,0.01808229,0.006104485],"study_design_scores_gemma":[0.0003423782,0.00005034961,0.0005791663,0.00001197668,0.000005965539,0.0000151908,0.0001562447,0.0004589201,0.9307806,0.01472403,0.05258785,0.0002872828],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9705318,0.001465597,0.003758681,0.000057807,0.0002605169,0.0002327287,0.000009167048,0.001774918,0.02190883],"genre_scores_gemma":[0.9802176,0.0007275721,0.01563531,0.0000478002,0.00006473135,0.0001045524,0.000004396515,0.00004552793,0.003152461],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03450556,"threshold_uncertainty_score":0.4381559,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01603672610592938,"score_gpt":0.2209208874282554,"score_spread":0.2048841613223261,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}