{"id":"W2122076209","doi":"10.1149/1.3123769","title":"Milestones in a Quarter Century of CMP - Plenary","year":2009,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"IBM; Chemical-mechanical planarization; Quarter (Canadian coin); Semiconductor industry; Moore's law; Engineering; Manufacturing engineering; Management; Business; Operations management; Electrical engineering; Mechanical engineering; Economics; History; Nanotechnology","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.004711258,0.0006419763,0.0002638162,0.001085622,0.002111125,0.007326398,0.001100196,0.004034445,0.01862963],"category_scores_gemma":[0.01020166,0.0003023343,0.0003538174,0.00150165,0.0045453,0.008646691,0.005045127,0.006895664,0.006806864],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.003926595,"about_ca_system_score_gemma":0.00377958,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001732058,"about_ca_topic_score_gemma":0.002137255,"domain_scores_codex":[0.9967241,0.0005894874,0.0001991302,0.0005298419,0.001446493,0.0005110427],"domain_scores_gemma":[0.9955934,0.001102496,0.0003466053,0.000436862,0.001263832,0.001256882],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"not_applicable","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0001630215,0.0001038681,0.001027399,0.0009310078,0.00001602477,0.0006684096,0.002596757,0.0003696547,0.002499488,0.3258183,0.3606145,0.3051917],"study_design_scores_gemma":[0.000003456975,0.00002635709,0.0004232473,0.000239314,0.000001556431,0.0002226115,0.0005887314,0.00004843753,0.0004433538,0.01116959,0.9868243,0.000008927868],"study_design_candidate":"not_applicable","study_design_consensus":"not_applicable","genre_codex":"commentary","genre_gemma":"other","genre_scores_codex":[0.01633771,0.2595103,0.01273385,0.4454477,0.06170885,0.0000888647,0.0004542093,0.0004425664,0.203276],"genre_scores_gemma":[0.1871439,0.316424,0.01967213,0.1140658,0.04938075,0.0002810523,0.0007908262,0.0009588898,0.3112825],"genre_candidate":"other","genre_consensus":null,"teacher_disagreement_score":0.01862963,"threshold_uncertainty_score":0.06232238,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005613017844271306,"score_gpt":0.2203600562743097,"score_spread":0.2147470384300384,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}