{"id":"W2122270904","doi":"10.1109/vlsit.1998.689251","title":"Highly uniform heteroepitaxy of cobalt silicide by using Co-Ti alloy for sub-quarter micron devices","year":2002,"lang":"en","type":"article","venue":"","topic":"Semiconductor materials and interfaces","field":"Physics and Astronomy","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Salicide; Materials science; Silicide; Cobalt; Alloy; Metallurgy; Substrate (aquarium); Epitaxy; Optoelectronics; Quarter (Canadian coin); Titanium; Silicon; Nanotechnology; Layer (electronics)","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.00006192546,0.0001670754,0.0002600043,0.00002920623,0.00005736942,0.00005860536,0.0001504789,0.00004069713,0.001800454],"category_scores_gemma":[0.000001184473,0.0001377049,0.00009815321,0.00003288871,0.00004292133,0.0002088441,0.00002028524,0.00003647044,0.00003345141],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001679079,"about_ca_system_score_gemma":0.000006431252,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006420075,"about_ca_topic_score_gemma":0.000009095093,"domain_scores_codex":[0.999127,0.00001674678,0.0003261421,0.0001962638,0.00008066696,0.0002532077],"domain_scores_gemma":[0.9995283,0.00003786484,0.0001603964,0.0001615948,0.00006041203,0.00005140099],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001207011,0.00007701061,0.003788887,0.0000267281,0.00005595185,5.596412e-8,0.0001165074,0.000007134369,0.9818916,0.0003227445,0.01341987,0.0002814405],"study_design_scores_gemma":[0.0004490833,0.0001295077,0.0001170001,0.00002724349,0.00002661555,4.792925e-7,0.0003324355,0.000899712,0.985647,0.0001101637,0.01207963,0.0001810832],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9962569,0.0001213755,0.0004013717,0.00007055028,0.0001806827,0.0002152432,0.0002546693,0.00002016127,0.002478979],"genre_scores_gemma":[0.9988497,0.000003463088,0.0004157701,0.0001041417,0.0001287787,0.000009568305,0.00004188148,0.00002032067,0.0004263028],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003755447,"threshold_uncertainty_score":0.999112,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02478137796945456,"score_gpt":0.2604939488306373,"score_spread":0.2357125708611827,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}