{"id":"W2122690958","doi":"10.1504/ijmtm.2008.016778","title":"Bulk micromachining for SOI based microsystems using double side XeF<SUB align=right>2 etching","year":2008,"lang":"en","type":"article","venue":"International Journal of Manufacturing Technology and Management","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Silicon on insulator; Materials science; Microsystem; Microfabrication; Microelectromechanical systems; Wafer; Surface micromachining; Etching (microfabrication); Optoelectronics; Xenon difluoride; Fabrication; Bulk micromachining; Photolithography; Wafer bonding; Silicon; Nanotechnology; Layer (electronics); Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001804576,0.000201485,0.0002611652,0.0009966623,0.0001547756,0.00003593448,0.0004578155,0.0001579478,0.000003083439],"category_scores_gemma":[0.00001136896,0.0001878961,0.00009617806,0.00007760443,0.0001248729,0.0002051321,0.0001397902,0.0002664431,0.000001465706],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001379107,"about_ca_system_score_gemma":0.00001125594,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000004035458,"about_ca_topic_score_gemma":0.000007277612,"domain_scores_codex":[0.9989312,0.00000382871,0.0004417872,0.0001790772,0.0001879707,0.0002561322],"domain_scores_gemma":[0.9994767,0.00004312827,0.0002155504,0.0001559554,0.00007221128,0.00003647566],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003395041,0.0001302506,0.000214787,0.0004207818,0.001696532,0.001419262,0.0001775482,0.09112999,0.8435595,0.008548272,0.0008954641,0.05146808],"study_design_scores_gemma":[0.001817856,0.0000631576,0.0001746767,0.0002851754,0.0000472781,0.0006839968,0.0001029678,0.002008619,0.9598229,0.003678402,0.03108291,0.0002320748],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9153796,0.0006912356,0.08174675,0.0005753029,0.0008798384,0.0002118335,0.000005580167,0.0002945187,0.0002153676],"genre_scores_gemma":[0.956711,0.0006780089,0.04236597,0.00004492502,0.0001065943,0.00001575718,0.000002514895,0.0000312061,0.00004404471],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1162634,"threshold_uncertainty_score":0.7662181,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01444842368745462,"score_gpt":0.2456404099471421,"score_spread":0.2311919862596875,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}