{"id":"W2123277086","doi":"10.1109/icma.2006.257461","title":"Design of a MEMS-Based Nanomanipulator with Sub-Nanometer Resolution","year":2006,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Microactuator; Microelectromechanical systems; Compliant mechanism; Capacitive sensing; Microfabrication; Electronic engineering; Precision engineering; Linearity; Materials science; Computer science; Actuator; Finite element method; Engineering; Nanotechnology; Miniaturization","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002662018,0.0005449558,0.0004805459,0.0002515698,0.0003700541,0.000360971,0.0009385496,0.0007346153,0.0009361869],"category_scores_gemma":[0.0002396339,0.0004444161,0.0003349788,0.0001637682,0.0002553875,0.0004981302,0.0004612377,0.0004307882,0.0008912194],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004199452,"about_ca_system_score_gemma":0.0005390343,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002233593,"about_ca_topic_score_gemma":0.000496442,"domain_scores_codex":[0.9998341,0.00001209849,0.00001243572,0.0000450982,0.00007737901,0.00001902267],"domain_scores_gemma":[0.9998552,0.00002839013,0.00005070944,0.00001313718,0.00003503039,0.00001753595],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002827144,0.00003302701,0.0002082016,0.0001859123,0.0000253859,0.000113219,0.00003983856,0.003261716,0.9711348,0.002348481,0.0004108152,0.02221043],"study_design_scores_gemma":[0.00007253193,0.000735857,0.001634142,0.00003287802,0.00006906631,0.001365629,0.00002510043,0.1121138,0.843936,0.0009611325,0.03897049,0.00008335693],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1201713,0.002967468,0.8664172,0.0006676244,0.0002316418,0.0005903717,0.0002478762,0.001825185,0.006881286],"genre_scores_gemma":[0.2920438,0.001246209,0.7011964,0.0002765996,0.0000923044,0.0005717959,0.0001988942,0.00007365931,0.004300303],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.0009385496,"threshold_uncertainty_score":0.003131807,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01317621121271559,"score_gpt":0.1893717262787833,"score_spread":0.1761955150660677,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}