{"id":"W2123361845","doi":"10.1109/plasma.2003.1229003","title":"Tapered-capillary pinch plasma as a candidate for bright EUV source","year":2003,"lang":"en","type":"article","venue":"","topic":"Plasma Diagnostics and Applications","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Capillary action; Plasma; Axial symmetry; Conical surface; Pinch; Z-pinch; Streak; Nozzle; Materials science; Optics; Mechanics; Extreme ultraviolet lithography; Physics","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001059566,0.0001251894,0.000179537,0.0001277289,0.0001773561,0.000316004,0.0002179428,0.0002761216,0.001095507],"category_scores_gemma":[0.0001217659,0.00007880503,0.0001118159,0.00009923124,0.0002073838,0.0002421608,0.0002243616,0.0002356403,0.0001497227],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002175057,"about_ca_system_score_gemma":0.0001173138,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000305069,"about_ca_topic_score_gemma":0.0003218106,"domain_scores_codex":[0.9999549,0.000006555171,7.76688e-7,0.000009167787,0.00001963442,0.000008824818],"domain_scores_gemma":[0.9999512,0.00001395423,0.000007053569,0.000005126894,0.00001146819,0.00001120041],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003909405,0.00003397796,0.00139441,0.0001814848,0.00001198076,0.001134779,0.000151937,0.004030362,0.9627774,0.008734067,0.0008070854,0.02035166],"study_design_scores_gemma":[0.0001029508,0.001683834,0.00905734,0.00003810251,0.00004271822,0.002275357,0.0002257059,0.07964438,0.8858188,0.005595314,0.01546154,0.00005394582],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9601915,0.002798368,0.02721116,0.0002188062,0.000058766,0.00006078161,0.00007064845,0.0002355568,0.009154472],"genre_scores_gemma":[0.9856859,0.0006533287,0.009632565,0.00003149813,0.00001759033,0.00002682678,0.00006439236,0.00001467639,0.003873261],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001095507,"threshold_uncertainty_score":0.003664851,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00565268063489971,"score_gpt":0.2005580142565999,"score_spread":0.1949053336217002,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}