{"id":"W2124336136","doi":"10.1117/1.jmm.11.3.033003","title":"Collapse of patterns with various geometries during drying in photolithography: numerical study","year":2012,"lang":"en","type":"article","venue":"Journal of Micro/Nanolithography MEMS and MOEMS","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Photolithography; USable; Numerical analysis; Deformation (meteorology); Laplace transform; Laplace pressure; Range (aeronautics); Line (geometry); Materials science; Mechanics; Computer science; Mechanical engineering; Geometry; Nanotechnology; Engineering; Composite material; Mathematics; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.000660788,0.0004115657,0.0008567086,0.002257007,0.00008094033,0.0000436198,0.0002881676,0.0001250184,0.00001031735],"category_scores_gemma":[0.00001712893,0.0003381967,0.0002425163,0.001847611,0.0001526271,0.000572721,0.00006681151,0.0004975586,1.691844e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004591067,"about_ca_system_score_gemma":0.00002021385,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00008667219,"about_ca_topic_score_gemma":0.00001737369,"domain_scores_codex":[0.9975067,0.00006296738,0.001056295,0.0002245809,0.0004637019,0.0006856998],"domain_scores_gemma":[0.9987367,0.00008730963,0.0004370693,0.0003257428,0.0001571091,0.0002561119],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"observational","study_design_gemma":"observational","study_design_scores_codex":[0.0002195819,0.0008575566,0.9367158,0.0001825032,0.0004465978,0.00008065296,0.002016018,0.0001145799,0.05858412,0.00002060237,0.00001176635,0.0007502429],"study_design_scores_gemma":[0.002674529,0.001292826,0.8552389,0.0003799264,0.0001859867,0.0006134504,0.002056028,0.000008140935,0.1362034,0.00009695364,0.0006827834,0.0005670023],"study_design_candidate":"observational","study_design_consensus":"observational","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9901307,0.006622788,0.002189,0.000004550401,0.0002508728,0.0005291975,0.0000287738,0.00008032434,0.0001637807],"genre_scores_gemma":[0.992539,0.001309252,0.005956325,0.00001072427,0.00007504362,0.00003550128,0.000001360645,0.00006956162,0.000003219587],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.08147684,"threshold_uncertainty_score":0.999907,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006642746547619448,"score_gpt":0.229089653886348,"score_spread":0.2224469073387285,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}