{"id":"W2124646061","doi":"10.1117/12.529492","title":"Creating 3D structures with a direct-write grayscale photomask made from Sn/In bimetallic films","year":2004,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Photomask; Materials science; Resist; Photoresist; Laser; Grayscale; Optics; Optoelectronics; Lithography; Nanotechnology; Layer (electronics); Pixel","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004895988,0.0002196581,0.0001224258,0.0001630503,0.0001301833,0.0003023905,0.0002931816,0.0002044231,0.00249782],"category_scores_gemma":[0.0001222971,0.0002623379,0.0001999622,0.0001174911,0.0001474349,0.0001935146,0.0002212144,0.0003001888,0.0006546876],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001840803,"about_ca_system_score_gemma":0.00009611149,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002680008,"about_ca_topic_score_gemma":0.000781541,"domain_scores_codex":[0.9999441,0.000003318189,0.000003210892,0.00001441442,0.00002542711,0.000009525969],"domain_scores_gemma":[0.999912,0.00001462307,0.0000198065,0.00002842517,0.00001249976,0.00001266816],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001372904,0.00001271559,0.0001275721,0.00003590068,0.000004238633,0.00009101806,0.00002245044,0.0004636437,0.9946001,0.0002567923,0.0001914401,0.004180357],"study_design_scores_gemma":[0.000006915551,0.00006751949,0.001809784,0.000002566352,0.0000063564,0.0002684445,0.00001678519,0.003107925,0.9911274,0.0001028394,0.00347645,0.000006908182],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"methods","genre_scores_codex":[0.9495015,0.0002043732,0.03788402,0.00009406156,0.00008469833,0.00007186842,0.0006518475,0.001549335,0.009958259],"genre_scores_gemma":[0.9027729,0.0002323582,0.09001008,0.00004617433,0.00001181344,0.00006881806,0.000398499,0.0001894291,0.006269913],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.00249782,"threshold_uncertainty_score":0.008356035,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006765089521414083,"score_gpt":0.2187265574571853,"score_spread":0.2119614679357713,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}