{"id":"W2124779661","doi":"10.1109/ispsd.2001.934576","title":"A high density, low on-resistance, trench lateral power MOSFET with a trench bottom source contact","year":2002,"lang":"en","type":"article","venue":"","topic":"Silicon Carbide Semiconductor Technologies","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Trench; Materials science; Breakdown voltage; Power MOSFET; MOSFET; Contact resistance; Optoelectronics; Electrical engineering; Voltage; Silicon; Power semiconductor device; Transistor; Composite material; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007316074,0.0002058386,0.0002646036,0.0001982454,0.0001876217,0.0003223332,0.0006312077,0.0003419782,0.0009520483],"category_scores_gemma":[0.0002438087,0.0001648877,0.0001398149,0.0002861914,0.0002023852,0.0003614512,0.000196148,0.0001302626,0.0003105137],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003049736,"about_ca_system_score_gemma":0.0002687556,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008348894,"about_ca_topic_score_gemma":0.002011422,"domain_scores_codex":[0.9998993,0.00000808915,0.000003860044,0.00002433015,0.00005032231,0.00001421306],"domain_scores_gemma":[0.9998345,0.00002809575,0.00002929514,0.00001656522,0.00007037914,0.00002110899],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001548549,0.0000585083,0.002662164,0.0002211884,0.00003606411,0.0006833666,0.00006860244,0.001503374,0.9699506,0.001307701,0.001364296,0.02198929],"study_design_scores_gemma":[0.0001895224,0.003401393,0.02672107,0.00004902983,0.0001736611,0.004300256,0.0001613176,0.05798297,0.8859752,0.001190431,0.01979954,0.00005564281],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.945287,0.001503122,0.04374836,0.0002148216,0.00009748527,0.0001119577,0.0006254624,0.0008158504,0.007595955],"genre_scores_gemma":[0.9837754,0.0002441145,0.01367604,0.00003647512,0.00002116671,0.00003437171,0.0001423196,0.00001314221,0.002056932],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009520483,"threshold_uncertainty_score":0.003184855,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008034200034792265,"score_gpt":0.1768267103155584,"score_spread":0.1687925102807662,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}