{"id":"W2126390377","doi":"10.1016/j.mee.2006.06.003","title":"Microfabrication processes on cylindrical substrates – Part I: Material deposition and removal","year":2006,"lang":"en","type":"article","venue":"Microelectronic Engineering","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":false,"ca_institutions":"","funders":"McMaster University","keywords":"Microfabrication; Materials science; Thin film; Deposition (geology); Planar; Composite material; Nanotechnology; Sputtering; Fabrication; Computer science; Computer graphics (images)","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005201593,0.0001878751,0.000134607,0.0001650124,0.00004745813,0.00007210571,0.00007933878,0.00009062035,0.00001103827],"category_scores_gemma":[0.000006210671,0.0002027168,0.00003094458,0.0003088047,0.00001640488,0.0001010107,0.00000785594,0.0001367909,0.000006042062],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008624756,"about_ca_system_score_gemma":0.00001503762,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001370461,"about_ca_topic_score_gemma":0.000005441749,"domain_scores_codex":[0.9991771,0.000008222875,0.0002159565,0.0001989158,0.00008412839,0.0003156882],"domain_scores_gemma":[0.99975,0.0000250431,0.00002495125,0.0001286913,0.00003109194,0.00004025895],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001068526,0.00002947214,0.00007182634,0.0001499423,0.00001626875,0.000005989355,0.00001797117,0.001635593,0.9924433,0.001974428,0.0005669881,0.003077548],"study_design_scores_gemma":[0.0001566203,0.00006190968,0.0007682694,0.00004925378,0.00001462155,0.0001256131,0.00000285667,0.003897912,0.9769257,0.0001039992,0.01762965,0.000263571],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9644423,0.003165765,0.02898225,0.00008215648,0.0001388641,0.0002582141,0.0000151488,0.001632748,0.001282582],"genre_scores_gemma":[0.9954787,0.0003609119,0.00375105,0.00001303211,0.0001787841,0.00005410862,0.00008415444,0.00004497419,0.00003422851],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03103648,"threshold_uncertainty_score":0.8266551,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.002925291479536856,"score_gpt":0.1735581304030019,"score_spread":0.170632838923465,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}