{"id":"W2126390377","doi":"10.1016/j.mee.2006.06.003","title":"Microfabrication processes on cylindrical substrates – Part I: Material deposition and removal","year":2006,"lang":"en","type":"article","venue":"Microelectronic Engineering","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":false,"ca_institutions":"","funders":"McMaster University","keywords":"Microfabrication; Materials science; Thin film; Deposition (geology); Planar; Composite material; Nanotechnology; Sputtering; Fabrication; Computer science; Computer graphics (images)","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002361921,0.0006639998,0.000971752,0.000449577,0.0007360114,0.000449011,0.0006634421,0.0005666121,0.002529896],"category_scores_gemma":[0.0004195055,0.0005330734,0.00042579,0.0005564884,0.0004842495,0.0006017935,0.0005334744,0.0005508255,0.00161576],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003087552,"about_ca_system_score_gemma":0.000483231,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007203553,"about_ca_topic_score_gemma":0.001286116,"domain_scores_codex":[0.9996759,0.00002090603,0.00001762723,0.00005731535,0.0001630551,0.00006527764],"domain_scores_gemma":[0.9997985,0.00005283928,0.00004313123,0.00005620686,0.00003825262,0.00001110382],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002882983,0.00001377363,0.00008057361,0.0001166447,0.000003564485,0.00003734713,0.000039953,0.0002378747,0.9920712,0.0003899488,0.0003681678,0.00661212],"study_design_scores_gemma":[0.00001106095,0.0001895701,0.004487505,0.00001114559,0.000008090078,0.0003120755,0.00003049058,0.001339818,0.9797146,0.0002201681,0.01366093,0.00001467313],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6670644,0.01842905,0.276307,0.0005310125,0.0006245649,0.0008244867,0.001425626,0.00267371,0.03212011],"genre_scores_gemma":[0.7499181,0.006417124,0.2053016,0.0002842308,0.0001478871,0.0006249278,0.002372136,0.0005301352,0.03440376],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002529896,"threshold_uncertainty_score":0.008463323,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.002925291479536856,"score_gpt":0.1735581304030019,"score_spread":0.170632838923465,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}