{"id":"W2127001167","doi":"","title":"Modeling the effect of charge injection due to ESD in MEMS","year":2009,"lang":"en","type":"article","venue":"","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University","funders":"","keywords":"Stiction; Electrostatic discharge; Microelectromechanical systems; Dielectric; Materials science; Air gap (plumbing); Charge (physics); Electric field; Voltage; Charge control; Electrical engineering; Optoelectronics; Electric charge; Engineering; Physics; Composite material; Power (physics); Thermodynamics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002044968,0.0004565994,0.0004615883,0.0002142153,0.0002756447,0.0004063307,0.0006256018,0.001024681,0.001264383],"category_scores_gemma":[0.000592956,0.0002895509,0.0005295497,0.0002070738,0.0003563683,0.0006949721,0.0003575996,0.0004163462,0.000248656],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005645762,"about_ca_system_score_gemma":0.0005926258,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.004419734,"about_ca_topic_score_gemma":0.002209255,"domain_scores_codex":[0.999915,0.00001679156,0.000003037329,0.00001022905,0.00003763136,0.00001732568],"domain_scores_gemma":[0.9998674,0.00006756259,0.00001818457,0.00001183373,0.00002492199,0.00001002519],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00004772442,0.00002713683,0.0005188222,0.00006801709,0.00002612565,0.0001970944,0.00005548122,0.9668074,0.02117372,0.00669331,0.0002924881,0.004092652],"study_design_scores_gemma":[0.000005532017,0.00003398095,0.0001640981,0.000003940763,0.00000736948,0.00002282759,0.000005319987,0.9972568,0.001387087,0.0007795936,0.0003296263,0.000003801458],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3808376,0.001542188,0.5896196,0.0006550647,0.0002134211,0.0001560874,0.0003974053,0.0009262018,0.02565241],"genre_scores_gemma":[0.9756054,0.0008248706,0.01485439,0.00009535071,0.0000480674,0.0001176156,0.0001003966,0.00008240655,0.008271602],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.004419734,"threshold_uncertainty_score":0.008788049,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008898241052859373,"score_gpt":0.224032740853141,"score_spread":0.2151344998002816,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}