{"id":"W2127941601","doi":"10.1017/s1431927612013414","title":"Three-Dimensional Electron Energy Deposition Modeling of Cathodoluminescence Emission near Threading Dislocations in GaN and Electron-Beam Lithography Exposure Parameters for a PMMA Resist","year":2012,"lang":"en","type":"article","venue":"Microscopy and Microanalysis","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":19,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"","keywords":"Cathodoluminescence; Resist; Materials science; Electron-beam lithography; Electron; Optoelectronics; Lithography; Cathode ray; Deposition (geology); Electron beam-induced deposition; Nanotechnology; Transmission electron microscopy; Physics; Scanning transmission electron microscopy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002163287,0.0001748354,0.0003011501,0.0001842029,0.0001262774,0.00005642731,0.0000598576,0.00009674866,0.000001891259],"category_scores_gemma":[0.00001371935,0.0001694345,0.00007424736,0.0002764451,0.00004650235,0.0001902662,0.00001511994,0.00006389373,1.259159e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003056062,"about_ca_system_score_gemma":0.00001379383,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006228369,"about_ca_topic_score_gemma":0.0003051301,"domain_scores_codex":[0.9990534,0.00002287073,0.0003195373,0.0002186937,0.00006580617,0.000319713],"domain_scores_gemma":[0.9996169,0.00006691241,0.00006370804,0.0001373773,0.00004021807,0.0000749262],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000058385,0.00003548398,0.007255583,0.0001102398,0.00006417236,1.499712e-7,0.0002576923,0.002154213,0.9897449,0.00001786437,0.00001724033,0.0002840806],"study_design_scores_gemma":[0.0002903902,0.00005154871,0.0009577564,0.0001137168,0.0001833652,0.000007761285,0.00006053366,0.05814614,0.9398391,0.000118871,0.00002398474,0.0002068951],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9738412,0.01374815,0.01219422,0.00001336458,0.00004790755,0.0001020416,0.00001971322,0.00002877901,0.000004614872],"genre_scores_gemma":[0.9887459,0.0003807861,0.01070609,0.00001840534,0.00002916704,0.00002985888,0.00006316282,0.00002332571,0.000003352759],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.05599192,"threshold_uncertainty_score":0.6909338,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01251194215216334,"score_gpt":0.2470943212864509,"score_spread":0.2345823791342875,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}