{"id":"W2127951937","doi":"10.1109/phycon.2003.1236842","title":"Discrete-time control system design for a Reactive Ion Etching (RIE) system","year":2004,"lang":"en","type":"article","venue":"","topic":"Adaptive Control of Nonlinear Systems","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Control theory (sociology); Multivariable calculus; Controller (irrigation); Transient (computer programming); Process (computing); Reactive-ion etching; Stability (learning theory); Computer science; Tracking (education); Discrete time and continuous time; Control system; Control engineering; Etching (microfabrication); Engineering; Materials science; Control (management); Mathematics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0005935911,0.0003429059,0.0006267913,0.0001180677,0.0001191995,0.00007887372,0.0002128421,0.0001695106,0.000003488396],"category_scores_gemma":[0.00006083038,0.0002948536,0.0001915548,0.0001159153,0.00002058691,0.0002840318,0.00001535856,0.0001600687,0.0002429398],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.001081007,"about_ca_system_score_gemma":0.00005943065,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00008296262,"about_ca_topic_score_gemma":0.00000803792,"domain_scores_codex":[0.9983427,0.00009555158,0.0005134164,0.0003268952,0.0002461824,0.0004752339],"domain_scores_gemma":[0.9988849,0.0003761121,0.0001091879,0.0003339461,0.0001410498,0.0001548641],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0004997294,0.00004169375,0.0000186443,0.001413452,0.000953933,0.00007998334,0.0008310245,0.8352241,0.1227959,0.03685937,0.0006541646,0.0006279542],"study_design_scores_gemma":[0.005127321,0.0002353815,0.00003818633,0.0008249162,0.0001489123,0.00009508793,0.001674282,0.9837888,0.006701405,0.00004216823,0.0007808884,0.0005426037],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.004321008,0.0002742268,0.9846855,0.00006591369,0.0006334623,0.002226573,0.00006099809,0.001852141,0.005880199],"genre_scores_gemma":[0.9849471,6.881086e-7,0.01374988,0.00001782621,0.0006223183,0.0003382394,0.00001030078,0.0001193761,0.0001942376],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.9806261,"threshold_uncertainty_score":0.9999503,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01114972808589,"score_gpt":0.2089107394283606,"score_spread":0.1977610113424706,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}