{"id":"W2127951937","doi":"10.1109/phycon.2003.1236842","title":"Discrete-time control system design for a Reactive Ion Etching (RIE) system","year":2004,"lang":"en","type":"article","venue":"","topic":"Adaptive Control of Nonlinear Systems","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Control theory (sociology); Multivariable calculus; Controller (irrigation); Transient (computer programming); Process (computing); Reactive-ion etching; Stability (learning theory); Computer science; Tracking (education); Discrete time and continuous time; Control system; Control engineering; Etching (microfabrication); Engineering; Materials science; Control (management); Mathematics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006335129,0.0005921808,0.0005974447,0.0001967962,0.0003934118,0.001117133,0.0007558845,0.0009859646,0.00211988],"category_scores_gemma":[0.0008872908,0.0002276169,0.0003744556,0.0002295638,0.0005396545,0.0003476481,0.0004543101,0.0009455875,0.0004207421],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005100775,"about_ca_system_score_gemma":0.0007051888,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002897793,"about_ca_topic_score_gemma":0.001832549,"domain_scores_codex":[0.9996049,0.0000792516,0.00002649879,0.0001243411,0.0001306855,0.00003440017],"domain_scores_gemma":[0.9997165,0.00009854381,0.0000531603,0.00001936004,0.00009987271,0.00001254068],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0002413293,0.0001050197,0.0005238258,0.0005701343,0.0000708696,0.0002751962,0.0003421963,0.8019099,0.05292908,0.03633626,0.001531345,0.1051649],"study_design_scores_gemma":[0.00003832663,0.0001766335,0.0001256288,0.00001438289,0.00001489903,0.00002941436,0.00001435866,0.9927748,0.00359901,0.001137893,0.002065103,0.000009565953],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.006785838,0.0002441569,0.9893985,0.0001819036,0.00008480206,0.00007240249,0.00002678259,0.0002290357,0.002976628],"genre_scores_gemma":[0.841936,0.0005629468,0.1512326,0.0001724219,0.0001081872,0.0005482294,0.0001082024,0.00003423416,0.005297221],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.002897793,"threshold_uncertainty_score":0.007091641,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01114972808589,"score_gpt":0.2089107394283606,"score_spread":0.1977610113424706,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}