{"id":"W2129009260","doi":"10.1117/12.910701","title":"Surface and interface study of SiO2-x coated InP/InGaAs/InGaAsP semiconductor laser microstructures processed in the soft KrF laser irradiation regime","year":2011,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"","keywords":"Materials science; Excimer laser; Laser; Irradiation; X-ray photoelectron spectroscopy; Optoelectronics; Gallium arsenide; Microstructure; Layer (electronics); Diffusion; Semiconductor; Optics; Nanotechnology; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005696373,0.0001869155,0.0001383362,0.0001486327,0.0002078775,0.0001728654,0.0001918957,0.0002178477,0.001280711],"category_scores_gemma":[0.0001193225,0.00016139,0.0001390801,0.000138281,0.0001842277,0.00013588,0.0001128424,0.0001852911,0.0001319913],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002695321,"about_ca_system_score_gemma":0.0001221054,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002002279,"about_ca_topic_score_gemma":0.002194491,"domain_scores_codex":[0.9999398,0.000003458011,0.000002370617,0.00001601386,0.00002513456,0.00001321691],"domain_scores_gemma":[0.9999188,0.00001544223,0.00002558953,0.000007140125,0.00002380058,0.000009124175],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002510362,0.000004185425,0.0003208612,0.00001829881,0.000002941001,0.00003236976,0.00002889657,0.00006491389,0.9992121,0.00002177055,0.00001130423,0.0002571957],"study_design_scores_gemma":[0.000009169242,0.0002151495,0.02382737,0.000004532892,0.00002294145,0.0001412128,0.0001145827,0.001701214,0.973195,0.00002633199,0.0007374731,0.000005047489],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9986373,0.0001692482,0.0005568299,0.0000107309,0.000004565125,0.000006089878,0.0001069225,0.00002362539,0.0004847473],"genre_scores_gemma":[0.9976414,0.0001692055,0.001081242,0.00001237145,0.000003696975,0.00001141049,0.0001589916,0.00001267952,0.0009091366],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002002279,"threshold_uncertainty_score":0.004284441,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01640172563034476,"score_gpt":0.2328917036307508,"score_spread":0.2164899780004061,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}