{"id":"W2129142139","doi":"10.1109/icmens.2004.1509025","title":"A Novel MEMS Tunable Capacitor","year":2006,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Capacitor; Microelectromechanical systems; Electrode; Materials science; Voltage; Actuator; Volt; Position (finance); Optoelectronics; Electrical engineering; Electronic engineering; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00001299958,0.00006522659,0.0000634817,0.00003278833,0.00002027087,0.000008630841,0.00005917087,0.00004966106,0.00004779568],"category_scores_gemma":[0.000004103063,0.00005552173,0.00001830015,0.00007844867,0.00001790461,0.00007281964,0.00001068174,0.00006012884,0.00004434873],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002077786,"about_ca_system_score_gemma":0.00000170737,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001094615,"about_ca_topic_score_gemma":0.0000650107,"domain_scores_codex":[0.9996754,1.127226e-7,0.00006797767,0.00006443925,0.00004214197,0.0001499298],"domain_scores_gemma":[0.9998514,0.000007626241,0.000004780989,0.0001164836,0.000007811765,0.00001190277],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[3.153979e-7,0.000007928926,0.000009311629,0.000006614752,0.000002956493,0.000001237861,0.000003343903,0.002254701,0.9821411,0.005296357,0.008150579,0.0021255],"study_design_scores_gemma":[0.0001812114,0.00001016708,0.0003547561,0.00000561558,0.000002314271,0.00000720759,0.00005855865,0.001508039,0.832238,0.004132751,0.1613338,0.0001676251],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5825282,0.0004772943,0.1935211,0.00009970648,0.0005629669,0.0001291413,0.000007388561,0.005191842,0.2174824],"genre_scores_gemma":[0.9622127,0.00002315074,0.03186069,0.00001478743,0.0001117819,0.00001645997,0.000001839202,0.00002024049,0.0057383],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3796846,"threshold_uncertainty_score":0.226411,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007062268343316915,"score_gpt":0.1819080474296367,"score_spread":0.1748457790863198,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}