{"id":"W2129142139","doi":"10.1109/icmens.2004.1509025","title":"A Novel MEMS Tunable Capacitor","year":2006,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Capacitor; Microelectromechanical systems; Electrode; Materials science; Voltage; Actuator; Volt; Position (finance); Optoelectronics; Electrical engineering; Electronic engineering; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001337444,0.0003265472,0.0003440277,0.0004378788,0.0005887617,0.0007984692,0.001260189,0.001194166,0.004427693],"category_scores_gemma":[0.0003168819,0.0001768274,0.0002097211,0.0005678423,0.0002721328,0.0009418946,0.0005625439,0.0006022761,0.001338021],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003981505,"about_ca_system_score_gemma":0.0005033236,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004853848,"about_ca_topic_score_gemma":0.000772554,"domain_scores_codex":[0.9996482,0.00001870767,0.00001249673,0.00007976816,0.0001934331,0.00004734425],"domain_scores_gemma":[0.9998193,0.00002704396,0.0000197317,0.00001779536,0.00006459456,0.00005149814],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007451981,0.00005056439,0.000174688,0.0002756409,0.00002007292,0.0009979017,0.00003463227,0.001034768,0.9368387,0.006725829,0.008361622,0.04541098],"study_design_scores_gemma":[0.0001442536,0.0003343936,0.001050167,0.00003889103,0.00007782803,0.005208061,0.00007075728,0.02102477,0.7429082,0.001883032,0.2271342,0.0001253856],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3518688,0.03014696,0.3959471,0.009543703,0.0102444,0.0006739054,0.001953052,0.00636881,0.1932532],"genre_scores_gemma":[0.7785341,0.006191087,0.1587754,0.002496142,0.00127381,0.0002431816,0.0006473238,0.0002149533,0.05162394],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.004427693,"threshold_uncertainty_score":0.01481211,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007062268343316915,"score_gpt":0.1819080474296367,"score_spread":0.1748457790863198,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}