{"id":"W2129239789","doi":"10.1557/opl.2012.1356","title":"Understanding the Impact of Porosity and Pore Structure in Ultra Low Dielectric Constant Organosilicate Glasses","year":2012,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":1,"is_retracted":false,"has_abstract":false,"ca_institutions":"Intertek (Canada)","funders":"University of Michigan","keywords":"Materials science; Porosity; Dielectric; Chemical engineering; Chemical vapor deposition; Interconnectivity; Composite material; Low-k dielectric; Plasma-enhanced chemical vapor deposition; X-ray photoelectron spectroscopy; Nanotechnology; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001604811,0.0001497633,0.0001596876,0.0001461013,0.0001722098,0.0004799103,0.0002582099,0.0003059734,0.0003362946],"category_scores_gemma":[0.0003458527,0.0001891476,0.00009476396,0.0001132442,0.0005555201,0.0008664522,0.000204776,0.0003519362,0.00006550261],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003583177,"about_ca_system_score_gemma":0.0003584103,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002108076,"about_ca_topic_score_gemma":0.002969735,"domain_scores_codex":[0.9999441,0.000006365411,0.000002710976,0.00001034763,0.00001793124,0.00001851878],"domain_scores_gemma":[0.9998184,0.00008918284,0.00004158817,0.00001257245,0.00002546658,0.00001276168],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000143531,0.00003914529,0.004013123,0.0001126627,0.00001330463,0.0001547766,0.0001100146,0.01069507,0.9763984,0.00376043,0.000118141,0.004441458],"study_design_scores_gemma":[0.00002521301,0.00030253,0.01860501,0.00002560017,0.0000650106,0.0002279532,0.0008546477,0.08565021,0.8859971,0.005825257,0.00237895,0.00004243623],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9971011,0.0004685767,0.001642173,0.00008055157,0.000004538189,0.000002597329,0.00002767688,0.00002030193,0.0006525093],"genre_scores_gemma":[0.9986935,0.0004985035,0.0006143747,0.00001331123,0.000003417947,0.000002241223,0.00002943209,0.000006100638,0.0001390896],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002108076,"threshold_uncertainty_score":0.004191637,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02850590104834225,"score_gpt":0.2651509580242962,"score_spread":0.2366450569759539,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}