{"id":"W2129274929","doi":"10.1116/1.1521736","title":"Copper device editing: Strategy for focused ion beam milling of copper","year":2002,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":30,"is_retracted":false,"has_abstract":true,"ca_institutions":"Fibics (Canada)","funders":"","keywords":"Focused ion beam; Materials science; Crystallite; Copper; Ion milling machine; Crystal (programming language); Ion beam; Etching (microfabrication); Phase (matter); Beam (structure); Ion; Optoelectronics; Layer (electronics); Metallurgy; Composite material; Optics; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007230674,0.0002306629,0.0004332413,0.00100893,0.0002800518,0.0001287781,0.0003348719,0.000139118,0.000007218644],"category_scores_gemma":[0.00003527483,0.0001767121,0.00007447421,0.0009575354,0.0003235015,0.0003376559,0.00002357113,0.0003483517,9.794704e-8],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001449189,"about_ca_system_score_gemma":0.0001111589,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001309034,"about_ca_topic_score_gemma":0.000004363273,"domain_scores_codex":[0.9983567,0.000009855341,0.000553805,0.0002457113,0.0003554767,0.0004784287],"domain_scores_gemma":[0.9987224,0.00001565052,0.0003208507,0.0001243767,0.0007298402,0.00008688732],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001065373,0.00001825921,0.0002051161,0.0001199962,0.00009764873,6.380915e-7,0.0003411045,0.0001832819,0.9570147,0.0003405481,0.00007991042,0.04158812],"study_design_scores_gemma":[0.001417349,0.001371372,0.0001046437,0.0002867618,0.0003693037,0.0001407208,0.0008396287,0.007718048,0.9769619,0.007298691,0.002993896,0.0004977502],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9541939,0.04325597,0.001933286,0.0001777349,0.0001602626,0.0001353008,0.000005139951,0.00003024459,0.00010819],"genre_scores_gemma":[0.9979509,0.0008152506,0.001082617,0.00002662821,0.00009408966,0.000003742607,7.740877e-7,0.00001949488,0.000006464963],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04375707,"threshold_uncertainty_score":0.7206112,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02875813764714724,"score_gpt":0.228527157375844,"score_spread":0.1997690197286967,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}