{"id":"W2129515555","doi":"10.1109/ted.2010.2093770","title":"Laser-Induced Resistance Fine Tuning of Integrated Polysilicon Thin-Film Resistors","year":2010,"lang":"en","type":"article","venue":"IEEE Transactions on Electron Devices","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal","funders":"Canada Research Chairs","keywords":"Materials science; Resistor; Polysilicon depletion effect; Optoelectronics; Fluence; Thin film; Raman spectroscopy; Laser; Optics; Transistor; Electrical engineering; Voltage; Nanotechnology; Gate oxide","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007878189,0.0002852491,0.0001780147,0.0001682551,0.0001526044,0.000156151,0.000323954,0.0002237617,0.0009508128],"category_scores_gemma":[0.0002994456,0.0001668146,0.00009881915,0.0001344881,0.00020451,0.0002588999,0.0001472413,0.0002551964,0.0001891411],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001633782,"about_ca_system_score_gemma":0.00009704672,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002408322,"about_ca_topic_score_gemma":0.0008682527,"domain_scores_codex":[0.9999037,0.000006068004,0.000006287788,0.00003019486,0.00003927436,0.0000145638],"domain_scores_gemma":[0.9998597,0.00003552022,0.00004510628,0.00002762532,0.00002331389,0.000008765968],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000137469,0.000004124613,0.00005868061,0.0000181415,0.000002023108,0.00003224266,0.00001907167,0.0001635175,0.9977847,0.00003023397,0.00002642116,0.001847036],"study_design_scores_gemma":[0.0000061119,0.000117447,0.001204869,0.000002357656,0.000005939866,0.0001146233,0.00001813155,0.002788813,0.9948416,0.00003501189,0.0008609372,0.000004064463],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9804277,0.0006659542,0.01696348,0.00006787163,0.00004961027,0.00002185115,0.00007174452,0.0004059266,0.001325798],"genre_scores_gemma":[0.9903487,0.0002067773,0.008099846,0.00002586247,0.00001352539,0.00001591037,0.00004167294,0.00004193471,0.001205621],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009508128,"threshold_uncertainty_score":0.003180802,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008154485192180396,"score_gpt":0.2143452573957264,"score_spread":0.206190772203546,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}