{"id":"W2129935076","doi":"10.1088/0960-1317/19/4/045007","title":"The nanogap Pirani—a pressure sensor with superior linearity in an atmospheric pressure range","year":2009,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":52,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Materials science; Atmospheric pressure; Pressure sensor; Optoelectronics; Etching (microfabrication); Linearity; Microheater; Fabrication; Layer (electronics); Composite material; Electronic engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001806882,0.0002120564,0.0003000186,0.00004458084,0.00007461384,0.00007723707,0.0002200017,0.0001180479,0.000002063101],"category_scores_gemma":[0.00001646512,0.000146795,0.0000493247,0.0001843024,0.00001772658,0.0002618395,0.00002225956,0.0004873548,3.105656e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000230531,"about_ca_system_score_gemma":0.00001303842,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000241309,"about_ca_topic_score_gemma":0.00001900614,"domain_scores_codex":[0.9991205,0.00000640283,0.0003188896,0.0001272928,0.0001091049,0.0003177655],"domain_scores_gemma":[0.9995644,0.00002891871,0.00007174318,0.0001870006,0.00007155352,0.00007639646],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005782474,0.00002574602,0.0000446771,0.00006335965,0.00005490295,0.00005868662,0.0002120828,0.02413459,0.963513,0.00008589179,0.00003561812,0.01171364],"study_design_scores_gemma":[0.007354706,0.003549377,0.007523968,0.001391135,0.000474805,0.003312908,0.002268407,0.1475111,0.6163656,0.0009854325,0.2072169,0.002045732],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9728568,0.02191905,0.004657453,0.00009981675,0.0002088325,0.0001446844,0.000005778094,0.0001002543,0.000007379267],"genre_scores_gemma":[0.980284,0.004337844,0.01519661,0.00001869513,0.00007554937,0.0000023679,4.527707e-7,0.00003686973,0.00004761928],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3471474,"threshold_uncertainty_score":0.5986125,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004187145187685966,"score_gpt":0.1892209871636842,"score_spread":0.1850338419759982,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}