{"id":"W2130146783","doi":"10.1016/s0925-4005(00)00664-x","title":"Design, fabrication and vapor characterization of a microfabricated flexural plate resonator sensor and application to integrated sensor arrays","year":2001,"lang":"en","type":"article","venue":"Sensors and Actuators B Chemical","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":39,"is_retracted":false,"has_abstract":false,"ca_institutions":"","funders":"Defense Advanced Research Projects Agency; McGill University; Charles Stark Draper Laboratory","keywords":"Resonator; Materials science; Coating; Sensor array; Fabrication; Optoelectronics; Analyte; Silicon; Nanotechnology; Chemistry; Computer science","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000351551,0.0004510448,0.0005409971,0.000336771,0.0003409516,0.000453078,0.001516251,0.0006387262,0.0009922761],"category_scores_gemma":[0.0005883427,0.0006855897,0.0002892224,0.0002375007,0.000287099,0.0005621752,0.0002854983,0.0004327604,0.0005731633],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006438601,"about_ca_system_score_gemma":0.0006703626,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001220837,"about_ca_topic_score_gemma":0.002855832,"domain_scores_codex":[0.9995178,0.00002469899,0.00002050614,0.0001264843,0.0002654257,0.00004507938],"domain_scores_gemma":[0.9995104,0.00009107998,0.0001112948,0.00009231853,0.0001606023,0.00003427353],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002407277,0.00001963432,0.0001565962,0.0000455939,0.000008514161,0.00004640705,0.00002147878,0.0002849378,0.9957839,0.0001380051,0.0001631173,0.00330768],"study_design_scores_gemma":[0.00001203438,0.0001486241,0.001349209,0.000001707812,0.0000112945,0.0001639461,0.000008595533,0.004446041,0.9920333,0.00002143567,0.001794623,0.000009007097],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7671123,0.001961504,0.2203937,0.0007297875,0.0002849901,0.0005213718,0.001080072,0.002492009,0.005424389],"genre_scores_gemma":[0.7856648,0.0005366612,0.2042276,0.0001873618,0.00007148743,0.0003102099,0.0006831482,0.0002075762,0.008111212],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001516251,"threshold_uncertainty_score":0.004671574,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009215671487990065,"score_gpt":0.2262543909368434,"score_spread":0.2170387194488533,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}