{"id":"W2131818324","doi":"10.1109/mwsym.2004.1336050","title":"RF MEMS waveguide switch","year":2004,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":27,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Actuator; Waveguide; Materials science; Power (physics); Radio frequency; Electronic engineering; Electrical engineering; Optoelectronics; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000140087,0.0003290567,0.0002227256,0.0001987966,0.0002956534,0.0004051315,0.0005204873,0.000400407,0.005221022],"category_scores_gemma":[0.0001672037,0.0001381921,0.0002839026,0.0001423336,0.0002632599,0.0006351413,0.0003903329,0.0005055343,0.002199282],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001672233,"about_ca_system_score_gemma":0.0001531135,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001262246,"about_ca_topic_score_gemma":0.0001715172,"domain_scores_codex":[0.9998499,0.00001192972,0.00000751051,0.00003835637,0.0000670348,0.00002523622],"domain_scores_gemma":[0.9999179,0.00001846074,0.00002007195,0.00001390526,0.00001972529,0.00001006932],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001234556,0.00006031301,0.0003485917,0.0001520731,0.0000263982,0.0003144009,0.00004603045,0.0004796392,0.9358584,0.01479414,0.004356697,0.04343977],"study_design_scores_gemma":[0.00006912682,0.0004991777,0.002010693,0.00004224663,0.00006007813,0.002019155,0.00007602007,0.008714897,0.8104267,0.002821975,0.1732169,0.00004291122],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3661469,0.01095743,0.4622475,0.002673592,0.004395081,0.0004329612,0.001189818,0.005492466,0.1464643],"genre_scores_gemma":[0.7794816,0.005343174,0.144282,0.001309399,0.001154988,0.0003377629,0.0007877143,0.0002613179,0.06704199],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.005221022,"threshold_uncertainty_score":0.01746601,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008653370845265618,"score_gpt":0.2128271692686655,"score_spread":0.2041737984233999,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}