{"id":"W2132798562","doi":"10.3390/s8042317","title":"A Micromachined Capacitive Pressure Sensor Using a Cavity-Less Structure with Bulk-Metal/Elastomer Layers and Its Wireless Telemetry Application","year":2008,"lang":"en","type":"article","venue":"Sensors","topic":"Advanced Sensor and Energy Harvesting Materials","field":"Engineering","cited_by":36,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"TRIUMF; University of Michigan","keywords":"Materials science; Capacitive sensing; Pressure sensor; Capacitance; Electromagnetic coil; Capacitor; Elastomer; Surface micromachining; Optoelectronics; Acoustics; Electrode; Electrical engineering; Composite material; Voltage; Mechanical engineering; Fabrication; Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.00004860656,0.0003409593,0.0003782316,0.0001269095,0.0002040128,0.00002661071,0.00008475093,0.0001522712,0.00001169594],"category_scores_gemma":[0.00002110012,0.0003029826,0.00003280776,0.0002574971,0.0001136003,0.0001533398,0.00002308819,0.0002223693,0.000005076283],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000424184,"about_ca_system_score_gemma":0.00001415744,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001325287,"about_ca_topic_score_gemma":0.00004549383,"domain_scores_codex":[0.9987874,0.00005642606,0.000231305,0.0003632317,0.0001874623,0.0003741472],"domain_scores_gemma":[0.9994252,0.00005571197,0.00008269653,0.0002209738,0.00008691312,0.0001284819],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004285838,0.000008472009,0.000322565,0.0001187613,0.0001052846,0.00003520606,0.0007056808,0.3004072,0.6979529,0.00005758902,0.000007352944,0.0002361818],"study_design_scores_gemma":[0.001636177,0.00009078346,0.004760348,0.0001460509,0.0002568598,0.001905575,0.0008310492,0.1432094,0.8440551,0.00006189887,0.001685083,0.001361711],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9975144,0.000190889,0.001222535,0.000008714885,0.0001225782,0.000259106,0.0001843024,0.0003275641,0.000169889],"genre_scores_gemma":[0.9938891,0.00003625777,0.005583228,0.00002038491,0.0001323477,0.000008661199,0.00002728541,0.00009823689,0.0002045016],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1571978,"threshold_uncertainty_score":0.9999422,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01077642448084951,"score_gpt":0.2064969529416482,"score_spread":0.1957205284607987,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}