{"id":"W2133002075","doi":"10.1109/ccece.2003.1226339","title":"Anomalous resistance effect of Si containing deep impurities and its application to micro-sensor","year":2004,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Impurity; Silicon; Semiconductor; Acceptor; Materials science; Sensitivity (control systems); Crystal (programming language); Spreading resistance profiling; Condensed matter physics; Analytical Chemistry (journal); Optoelectronics; Chemistry; Electronic engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002544713,0.0002158621,0.0002818475,0.0001719792,0.0001107622,0.0002529499,0.0002992532,0.0004129337,0.0003873829],"category_scores_gemma":[0.0006722023,0.0001420862,0.0001748967,0.0001565941,0.0003097104,0.0004362761,0.0002250084,0.0003794126,0.0001726912],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001987682,"about_ca_system_score_gemma":0.0001188966,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001969233,"about_ca_topic_score_gemma":0.0001983061,"domain_scores_codex":[0.9998081,0.00002984179,0.000008975875,0.00004405122,0.00009034562,0.00001875149],"domain_scores_gemma":[0.9995696,0.000197361,0.00005897673,0.00007023961,0.00008247379,0.00002133754],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005587231,0.00001324897,0.0005773989,0.00006983826,0.000007517362,0.0001606694,0.0000350227,0.00131347,0.9831386,0.00175709,0.000111065,0.01276022],"study_design_scores_gemma":[0.000006392691,0.0002265246,0.001879421,0.000007903184,0.00001952717,0.0008576413,0.00002020703,0.03128233,0.9618012,0.001284883,0.002594923,0.0000190533],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8179287,0.006460057,0.1649158,0.0005198106,0.000210222,0.00007268898,0.0001659549,0.001596098,0.008130593],"genre_scores_gemma":[0.9638001,0.001194154,0.03362907,0.00007528979,0.00003933174,0.00001874666,0.00003839494,0.00003609428,0.001168856],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0004129337,"threshold_uncertainty_score":0.001442134,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003363222355533578,"score_gpt":0.2087306589063305,"score_spread":0.2053674365507969,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}