{"id":"W2133094441","doi":"10.3390/s100201338","title":"Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures","year":2010,"lang":"en","type":"article","venue":"Sensors","topic":"Advanced Sensor Technologies Research","field":"Engineering","cited_by":34,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Characterization (materials science); Thin film; Materials science; High pressure; Engineering physics; Optoelectronics; Nanotechnology; Composite material; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002534769,0.0002371665,0.0001589897,0.0003561652,0.0001517616,0.0001749272,0.0002572224,0.0002466598,0.0007919155],"category_scores_gemma":[0.0003986839,0.0001687209,0.0001895272,0.0002758984,0.000148443,0.0001932474,0.000089368,0.0002431719,0.000238833],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000198011,"about_ca_system_score_gemma":0.0001882282,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001010784,"about_ca_topic_score_gemma":0.002995572,"domain_scores_codex":[0.9998465,0.000008271971,0.000009577242,0.00002576359,0.0000935803,0.00001634586],"domain_scores_gemma":[0.9997298,0.00005167338,0.00004849032,0.00002348,0.0001196638,0.00002689943],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000101737,0.000003833168,0.0001383055,0.00003443905,0.000001472031,0.000022941,0.00001642537,0.00008201868,0.9988145,0.00002478312,0.00003856663,0.0008127357],"study_design_scores_gemma":[0.00000270569,0.0001461928,0.007102252,0.00001533052,0.000009566795,0.0001235918,0.00004650393,0.001625481,0.98865,0.00001567754,0.002255877,0.000006909708],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9833406,0.00174516,0.008782079,0.00007008127,0.00007114423,0.00009479518,0.0008268692,0.00007227004,0.004996944],"genre_scores_gemma":[0.9764107,0.001588344,0.01729381,0.00005040502,0.00001689191,0.0001036037,0.001016552,0.0000466325,0.003473094],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001010784,"threshold_uncertainty_score":0.002649188,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007636641181333644,"score_gpt":0.2334485389268511,"score_spread":0.2258118977455175,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}