{"id":"W2133615958","doi":"10.1039/c3tc00874f","title":"Single component photoacid/photobase generators: potential applications in double patterning photolithography","year":2013,"lang":"en","type":"article","venue":"Journal of Materials Chemistry C","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":19,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Ottawa","funders":"","keywords":"Materials science; Photolithography; Lithography; Resist; Dissolution; Laser; Optoelectronics; Photochemistry; Nanotechnology; Optics; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001750238,0.0001651308,0.0002767704,0.0001448267,0.00003187961,0.000120292,0.0002163766,0.00009820761,0.0007334471],"category_scores_gemma":[0.000002589141,0.0001540647,0.0001097863,0.0002176696,0.00003074856,0.0001807699,0.00001967011,0.0001327726,0.000006309262],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005469144,"about_ca_system_score_gemma":0.00001294235,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003706006,"about_ca_topic_score_gemma":3.853239e-7,"domain_scores_codex":[0.9988614,0.00002005238,0.0006350781,0.000110783,0.0001742265,0.0001984184],"domain_scores_gemma":[0.9993671,0.00001204122,0.000212549,0.0001879623,0.0001086101,0.0001117307],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001092113,0.0000958304,0.0005649647,0.0001014842,0.00002501271,0.00000640137,0.00004159744,0.00009584905,0.9983047,0.000003612668,0.0005560567,0.0001935459],"study_design_scores_gemma":[0.0004763915,0.00001228479,0.001064201,0.00005726247,0.00001353705,0.00005293635,0.00005972918,0.00004602358,0.9947822,0.00006795977,0.003209893,0.0001575836],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9968125,0.0001680326,0.002017327,0.00002444461,0.0001344809,0.0002324154,0.0000197176,0.0001021564,0.0004889113],"genre_scores_gemma":[0.9965099,0.00006787738,0.003038267,0.00002765152,0.0001919906,0.0001033562,0.00002315632,0.00002676991,0.00001101343],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003522525,"threshold_uncertainty_score":0.8030732,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006857745879317483,"score_gpt":0.2016774502983661,"score_spread":0.1948197044190486,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}