{"id":"W2133638446","doi":"10.1016/j.surfcoat.2013.07.067","title":"The effect of argon plasma treatment on the permeation barrier properties of silicon nitride layers","year":2013,"lang":"en","type":"article","venue":"Surface and Coatings Technology","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":33,"is_retracted":false,"has_abstract":false,"ca_institutions":"","funders":"Pacific Institute for Climate Solutions","keywords":"Materials science; Silicon nitride; Polyethylene terephthalate; Permeation; Plasma; Silicon; Plasma-enhanced chemical vapor deposition; Chemical vapor deposition; Argon; Barrier layer; Layer (electronics); Composite material; Optoelectronics; Chemical engineering; Nanotechnology; Membrane; Organic chemistry","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008968655,0.00009498357,0.0001479865,0.00002734895,0.00006087697,0.00001437699,0.00007930378,0.0000744748,0.000009697072],"category_scores_gemma":[0.00004499672,0.00004330408,0.00002066758,0.00006540507,0.00011887,0.00003378868,0.0000122606,0.00004770844,0.000005991845],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001239833,"about_ca_system_score_gemma":0.000003872573,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001486112,"about_ca_topic_score_gemma":0.00001761517,"domain_scores_codex":[0.9996092,0.00002230329,0.0001385278,0.00007419337,0.00005089144,0.0001048967],"domain_scores_gemma":[0.9996433,0.0001251787,0.00005196223,0.0001457183,0.00002447452,0.000009342843],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001406665,0.000002724953,0.001795059,0.00003587222,0.00002086465,5.898374e-8,0.0001943917,0.0003371103,0.9955251,0.0001440622,0.00003025915,0.001900416],"study_design_scores_gemma":[0.0001619623,0.0003547761,0.0001361677,0.00003743303,0.00001116841,0.000001108592,0.0006660732,0.0006046532,0.9977047,0.00008654957,0.0001896974,0.00004564534],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9985464,0.0006375138,3.706454e-7,0.0001963653,0.00006185519,0.0002862848,0.00000233432,0.00007267877,0.0001961495],"genre_scores_gemma":[0.9997252,0.0001656265,0.000007605377,0.000004965031,0.000006104974,0.00004401948,4.908503e-7,0.000009379176,0.00003663411],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002179651,"threshold_uncertainty_score":0.1765889,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007468457758910143,"score_gpt":0.1890868528463422,"score_spread":0.181618395087432,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}