{"id":"W2133638446","doi":"10.1016/j.surfcoat.2013.07.067","title":"The effect of argon plasma treatment on the permeation barrier properties of silicon nitride layers","year":2013,"lang":"en","type":"article","venue":"Surface and Coatings Technology","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":33,"is_retracted":false,"has_abstract":false,"ca_institutions":"","funders":"Pacific Institute for Climate Solutions","keywords":"Materials science; Silicon nitride; Polyethylene terephthalate; Permeation; Plasma; Silicon; Plasma-enhanced chemical vapor deposition; Chemical vapor deposition; Argon; Barrier layer; Layer (electronics); Composite material; Optoelectronics; Chemical engineering; Nanotechnology; Membrane; Organic chemistry","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001883135,0.0002093662,0.0001824348,0.0001369955,0.0002436304,0.0003129361,0.0002204245,0.0003272887,0.00148999],"category_scores_gemma":[0.0004658319,0.0001924521,0.000236751,0.00015768,0.0002801802,0.0004385706,0.000107562,0.000337678,0.0002437145],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002105742,"about_ca_system_score_gemma":0.0001924905,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001347783,"about_ca_topic_score_gemma":0.00125616,"domain_scores_codex":[0.9998404,0.00002628861,0.00001049749,0.00002346577,0.00004742743,0.00005186707],"domain_scores_gemma":[0.9996839,0.0001637643,0.00004921448,0.00002523747,0.00005938908,0.00001863306],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0004380363,0.0000153242,0.0002932123,0.00005807811,0.00001375738,0.00006950257,0.00006889675,0.0001424901,0.9971997,0.0000965697,0.00005651138,0.001547831],"study_design_scores_gemma":[0.000005501959,0.0001993814,0.002061876,0.000002661802,0.00001282962,0.00006886397,0.00003829518,0.0005865071,0.9964915,0.0000200969,0.0005056131,0.000006904807],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9984155,0.000618845,0.0002797869,0.00002576492,0.00001302624,0.000003913504,0.00005143682,0.00001427974,0.0005775362],"genre_scores_gemma":[0.9985113,0.0003363311,0.0002567738,0.00001347034,0.000004697802,0.000003696445,0.00008139698,0.00001130055,0.000781065],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00148999,"threshold_uncertainty_score":0.004984558,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007468457758910143,"score_gpt":0.1890868528463422,"score_spread":0.181618395087432,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}