{"id":"W2133896634","doi":"10.1063/1.4933037","title":"Light-induced degradation of native silicon oxide–silicon nitride bilayer passivated silicon","year":2015,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Passivation; Materials science; Silicon nitride; Silicon; Oxide; Silicon oxide; Degradation (telecommunications); Plasma-enhanced chemical vapor deposition; Bilayer; Optoelectronics; Layer (electronics); Nanotechnology; Chemistry; Electronic engineering; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001709927,0.0002908339,0.0001927728,0.0001302343,0.0001155046,0.0001847951,0.0001744013,0.0002786012,0.001227323],"category_scores_gemma":[0.0002401757,0.0001424681,0.0001932519,0.0001141317,0.0001538643,0.0001855912,0.0001581009,0.0003036489,0.0001685766],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002192354,"about_ca_system_score_gemma":0.0001286092,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007011266,"about_ca_topic_score_gemma":0.00112975,"domain_scores_codex":[0.9998746,0.00001012094,0.00001205393,0.00003076898,0.00003520328,0.00003731194],"domain_scores_gemma":[0.9998023,0.00006413842,0.00004090345,0.00002670586,0.00004808824,0.00001791371],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004872396,0.000008662207,0.0001081801,0.00002372602,0.000004358394,0.00002891889,0.00002084591,0.00003893254,0.9991553,0.00001123343,0.00001032683,0.0005407747],"study_design_scores_gemma":[0.000002413432,0.0001379447,0.00173138,0.000001857322,0.000003456417,0.00002624954,0.00001474692,0.0003248691,0.9976026,0.00000427012,0.0001485695,0.000001631499],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9987048,0.0003393978,0.0005150556,0.00001036582,0.00001382679,0.000007363631,0.0001038081,0.00002198135,0.0002835099],"genre_scores_gemma":[0.9981933,0.0003134453,0.0006174403,0.00001539419,0.000002882372,0.000008873852,0.0001315083,0.000009356294,0.0007077422],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001227323,"threshold_uncertainty_score":0.004105806,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02462740878469406,"score_gpt":0.2253207536968541,"score_spread":0.20069334491216,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}