{"id":"W2134288793","doi":"10.2528/pier06081404","title":"TWO NOVEL STRUCTURES FOR TUNABLE MEMS CAPACITOR WITH RF APPLICATIONS","year":2007,"lang":"en","type":"article","venue":"Electromagnetic waves","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":27,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Iran Telecommunication Research Center; University of Waterloo","keywords":"Microelectromechanical systems; Capacitor; Materials science; Optoelectronics; Electrical engineering; Engineering; Voltage","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004564432,0.0001591492,0.0001410331,0.0000872653,0.00008834612,0.0000198562,0.00014511,0.00006773524,0.00001302176],"category_scores_gemma":[0.00001199648,0.000133281,0.00002993705,0.0001944102,0.00007206792,0.00006371003,0.00001017783,0.0001326591,0.000002792625],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004219847,"about_ca_system_score_gemma":0.00001215616,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000124352,"about_ca_topic_score_gemma":0.00007951145,"domain_scores_codex":[0.9991557,4.574829e-7,0.0001390067,0.0001789821,0.00008997993,0.000435848],"domain_scores_gemma":[0.9995853,0.00006623527,0.00002510508,0.0002377349,0.00003651935,0.0000491302],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001155932,0.00001194958,0.000004926546,0.00002851706,0.0000190389,7.392374e-7,0.00003019205,0.000281607,0.9827365,0.006272245,0.000206372,0.01039638],"study_design_scores_gemma":[0.0006421218,0.0004166018,0.0005337005,0.000008531486,0.00002272901,0.00002967735,0.0001769849,0.000246053,0.9487243,0.0129574,0.03596262,0.0002793055],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7237436,0.001514101,0.2693752,0.00006509543,0.000111892,0.0008259622,0.00002010764,0.001109185,0.003234783],"genre_scores_gemma":[0.8446779,0.00004688432,0.1542042,0.00002176317,0.000200889,0.0002078511,0.00001110507,0.00005079904,0.0005786483],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1209342,"threshold_uncertainty_score":0.5435041,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006613139200482501,"score_gpt":0.2252991588603222,"score_spread":0.2186860196598397,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}