{"id":"W2134288793","doi":"10.2528/pier06081404","title":"TWO NOVEL STRUCTURES FOR TUNABLE MEMS CAPACITOR WITH RF APPLICATIONS","year":2007,"lang":"en","type":"article","venue":"Electromagnetic waves","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":27,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Iran Telecommunication Research Center; University of Waterloo","keywords":"Microelectromechanical systems; Capacitor; Materials science; Optoelectronics; Electrical engineering; Engineering; Voltage","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001130958,0.0003718412,0.000219216,0.0002355271,0.0003940858,0.0005915028,0.001034156,0.001204998,0.002421618],"category_scores_gemma":[0.0002982708,0.0003312847,0.0001631007,0.0002534148,0.0003741632,0.0008046762,0.0004485389,0.0005667714,0.0007902966],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004589337,"about_ca_system_score_gemma":0.000376533,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003068817,"about_ca_topic_score_gemma":0.0007975667,"domain_scores_codex":[0.9998736,0.00000856025,0.000004717753,0.00002773944,0.00005820308,0.00002714307],"domain_scores_gemma":[0.9998205,0.00002729371,0.00004004042,0.00002457626,0.00005251156,0.00003503837],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007468399,0.00003518958,0.000161494,0.0001080344,0.00001237194,0.0003038058,0.00006781365,0.0005901776,0.9803443,0.003957669,0.001124003,0.01322047],"study_design_scores_gemma":[0.000125459,0.0004282478,0.002150723,0.00001381868,0.00003107046,0.001900206,0.0000723751,0.01608998,0.9470125,0.001654344,0.03045774,0.00006365705],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6751998,0.004187008,0.2839917,0.003567658,0.0009023253,0.0002793212,0.0006825414,0.001876083,0.0293135],"genre_scores_gemma":[0.8228477,0.0006434876,0.1575644,0.0005635186,0.000180136,0.0001457119,0.0002299519,0.00007435949,0.01775087],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002421618,"threshold_uncertainty_score":0.008101106,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006613139200482501,"score_gpt":0.2252991588603222,"score_spread":0.2186860196598397,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}