{"id":"W2134484220","doi":"10.1109/ccece.2007.7","title":"Bulk-Metal-Based Mems Fabricated by Micro-Electro-Discharge Machining","year":2007,"lang":"en","type":"article","venue":"","topic":"Advanced Machining and Optimization Techniques","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"","keywords":"Surface micromachining; Microelectromechanical systems; Materials science; Fabrication; Actuator; Microelectrode; Machining; Capacitive sensing; Electrical discharge machining; Microfabrication; Bulk micromachining; Planar; Miniaturization; Optoelectronics; Nanotechnology; Electrical engineering; Electrode; Computer science; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001204727,0.0003401849,0.0004247133,0.0002215763,0.0001605373,0.0002929759,0.0006547793,0.0005167617,0.001293277],"category_scores_gemma":[0.0002312874,0.0003135585,0.0002391664,0.000190025,0.0002124765,0.0003705452,0.0001898028,0.0005792585,0.001053016],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002121306,"about_ca_system_score_gemma":0.0002075577,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001913698,"about_ca_topic_score_gemma":0.0005569909,"domain_scores_codex":[0.9998319,0.000005894933,0.00001015301,0.0000412865,0.00009564766,0.0000151814],"domain_scores_gemma":[0.9998825,0.00002416321,0.00002835497,0.00002004094,0.00003559567,0.00000932338],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002338147,0.0000125274,0.0001422595,0.000247639,0.000008798961,0.00007338418,0.00002410933,0.0002410198,0.9847068,0.0006432068,0.0005914712,0.01328545],"study_design_scores_gemma":[0.00003319283,0.0002769904,0.002098955,0.00001641654,0.00002382809,0.0005973799,0.00002442748,0.004232056,0.9622251,0.0003853972,0.03006687,0.0000194523],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.641008,0.02425866,0.2894475,0.0009432621,0.002568464,0.0004591563,0.001885407,0.003253707,0.03617572],"genre_scores_gemma":[0.6717976,0.004784074,0.3072638,0.0003218925,0.0002516478,0.0001764236,0.001047882,0.000176015,0.01418071],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001293277,"threshold_uncertainty_score":0.004326403,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004884634252964035,"score_gpt":0.2266736776670617,"score_spread":0.2217890434140977,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}