{"id":"W2134869583","doi":"10.1557/jmr.2009.0005","title":"The effect of porogen loading on the stiffness and fracture energy of brittle organosilicates","year":2009,"lang":"en","type":"article","venue":"Journal of materials research/Pratt's guide to venture capital sources","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":46,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Composite material; Porosity; Stiffness; Nanoindentation; Dielectric; Plasma-enhanced chemical vapor deposition; Brittleness; Low-k dielectric; Permittivity; Chemical vapor deposition; Nanotechnology; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002366921,0.000226651,0.0001920448,0.0002436077,0.0002378078,0.0003104263,0.0002211758,0.0003378214,0.004238948],"category_scores_gemma":[0.0006502288,0.0002741419,0.000180768,0.0002419697,0.0004691542,0.0004060566,0.000204709,0.0003489522,0.0003754858],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001776948,"about_ca_system_score_gemma":0.0001380112,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005091691,"about_ca_topic_score_gemma":0.001033895,"domain_scores_codex":[0.9998187,0.00002232318,0.00001475579,0.00002551701,0.00006450698,0.00005417578],"domain_scores_gemma":[0.9993906,0.0003674899,0.00009059117,0.00004558313,0.00006984092,0.00003597483],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0009485937,0.00005070926,0.0009102809,0.0000576418,0.000009552989,0.0001180366,0.0000686891,0.00249042,0.9908897,0.0001623964,0.00006584426,0.004228017],"study_design_scores_gemma":[0.000008017595,0.0003883735,0.006520572,0.000004922892,0.000008354155,0.00004884108,0.00008196802,0.0036991,0.9888412,0.00007670214,0.0003082213,0.0000136458],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9988445,0.000135751,0.0001932676,0.00001426048,0.000004570869,0.000002332377,0.00005058774,0.000009577549,0.0007451072],"genre_scores_gemma":[0.9992239,0.00007797012,0.0001091408,0.000007786695,0.000001778513,0.000002582615,0.00003972383,0.00001019693,0.0005268447],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004238948,"threshold_uncertainty_score":0.01418066,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01169588957876579,"score_gpt":0.3028561806854454,"score_spread":0.2911602911066796,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}