{"id":"W2135261920","doi":"10.1115/imece2007-42506","title":"Design and Optimization of a New Highly Linear Tunable MEMS Capacitor","year":2007,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Toronto Metropolitan University; University of Waterloo","funders":"","keywords":"Capacitor; Capacitance; Linearity; Materials science; Voltage; Microelectromechanical systems; Sense (electronics); Nonlinear system; Electronic engineering; Electrode; Electrical engineering; Optoelectronics; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002073239,0.0002644453,0.0003487642,0.0003069882,0.0003289898,0.0006213167,0.000698479,0.0005628357,0.001578419],"category_scores_gemma":[0.0002755033,0.000227088,0.0001711218,0.0003665724,0.0002380289,0.000452869,0.0002938571,0.0003824616,0.0003935262],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000553011,"about_ca_system_score_gemma":0.0006906721,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007519452,"about_ca_topic_score_gemma":0.001445535,"domain_scores_codex":[0.9997959,0.00001023775,0.000008518272,0.00004525563,0.0001113702,0.00002890808],"domain_scores_gemma":[0.9997962,0.00003189427,0.00003657975,0.00001693578,0.00008575719,0.0000325232],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004987868,0.00003049906,0.0001707233,0.000134984,0.00002300891,0.000161086,0.00002496164,0.009394414,0.9771064,0.001211137,0.0004507325,0.01124205],"study_design_scores_gemma":[0.0001545628,0.0003641876,0.001508041,0.00001291146,0.00006706802,0.0005794237,0.00005105429,0.1284348,0.8484397,0.0004649249,0.01986336,0.00005999761],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6069013,0.00190473,0.365904,0.001150178,0.0003228599,0.0002675705,0.0004746413,0.001209214,0.02186544],"genre_scores_gemma":[0.7580441,0.0006465039,0.2306355,0.0002666035,0.00008778281,0.0001982673,0.0003017717,0.0001517995,0.009667673],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001578419,"threshold_uncertainty_score":0.005280316,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01690790794167911,"score_gpt":0.2235077270877147,"score_spread":0.2065998191460356,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}