{"id":"W2135970569","doi":"10.1109/solsen.1988.26463","title":"Polysilicon microbridge fabrication using standard CMOS technology","year":2003,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Fabrication; CMOS; Etching (microfabrication); Polysilicon depletion effect; Layer (electronics); Materials science; Process (computing); Electronic engineering; Nanotechnology; Optoelectronics; Electrical engineering; Computer science; Engineering; Transistor; Gate oxide; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001606734,0.0005678721,0.0003571716,0.0003607466,0.0006143121,0.0005618345,0.0006093468,0.0005611874,0.005093561],"category_scores_gemma":[0.0002647927,0.0004113525,0.0002223676,0.0003191814,0.0002063998,0.0005130272,0.0004042939,0.0005434894,0.005364349],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003720988,"about_ca_system_score_gemma":0.0004893645,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006355079,"about_ca_topic_score_gemma":0.001748009,"domain_scores_codex":[0.9997013,0.00001415864,0.00001756247,0.00007017989,0.0001659696,0.00003081466],"domain_scores_gemma":[0.9998436,0.00002195925,0.00002409041,0.00003870942,0.00005648619,0.00001510462],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004269951,0.00002707972,0.0001309226,0.000446932,0.00001190468,0.0003248411,0.0001348404,0.0004560742,0.9646063,0.005036336,0.005127425,0.02365466],"study_design_scores_gemma":[0.00001992908,0.0002436381,0.0009293972,0.00002243107,0.00001618871,0.0009629733,0.00004831822,0.001716272,0.838985,0.0009488153,0.1560805,0.0000265996],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2093576,0.01108815,0.650318,0.001252906,0.002886303,0.001902625,0.005216797,0.01054961,0.107428],"genre_scores_gemma":[0.3735333,0.009879339,0.5122365,0.0006073057,0.0002874371,0.001416804,0.003685943,0.001023854,0.09732957],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.005093561,"threshold_uncertainty_score":0.01703972,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01003592344023881,"score_gpt":0.2289519190045909,"score_spread":0.2189159955643521,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}