{"id":"W2135970569","doi":"10.1109/solsen.1988.26463","title":"Polysilicon microbridge fabrication using standard CMOS technology","year":2003,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Fabrication; CMOS; Etching (microfabrication); Polysilicon depletion effect; Layer (electronics); Materials science; Process (computing); Electronic engineering; Nanotechnology; Optoelectronics; Electrical engineering; Computer science; Engineering; Transistor; Gate oxide; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00003907595,0.00009971666,0.0001157873,0.0001625052,0.00004877355,0.000009245526,0.000081477,0.0001207078,0.00003957941],"category_scores_gemma":[0.00004667977,0.00009567153,0.00002263194,0.0003432686,0.00004479699,0.00008308121,0.0000167498,0.0001122697,0.00001792555],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008051468,"about_ca_system_score_gemma":0.000009098282,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003330991,"about_ca_topic_score_gemma":0.000003872021,"domain_scores_codex":[0.9994846,0.000001604749,0.0001193303,0.0001217426,0.00004619104,0.0002265539],"domain_scores_gemma":[0.9996976,0.000007669215,0.00001628787,0.0002285189,0.00003170711,0.00001827008],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[9.352921e-7,0.000004062667,0.0001902741,0.00000753514,0.000009380628,0.000001466191,0.000006839705,0.001019439,0.9786751,0.008043171,0.000264059,0.0117777],"study_design_scores_gemma":[0.000122426,0.00001520515,0.00004819642,0.000006668391,0.000004995291,0.00001534264,0.000125628,0.0004031209,0.9630556,0.002648918,0.03342255,0.0001313713],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8247506,0.0006618434,0.1675733,0.00004958212,0.0001461899,0.0001023161,0.000003240333,0.001789023,0.004923831],"genre_scores_gemma":[0.9499719,0.0001204127,0.04970456,0.00001519788,0.00001019177,0.000008236184,9.772203e-7,0.00002172063,0.0001468723],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1252212,"threshold_uncertainty_score":0.3901372,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01003592344023881,"score_gpt":0.2289519190045909,"score_spread":0.2189159955643521,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}