{"id":"W2136108399","doi":"10.1109/mwsym.2008.4633017","title":"Low temperature variable inductor using Porous Anodic Alumina","year":2008,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Inductor; RFIC; Microelectromechanical systems; Aluminium; Dielectric; Anode; Optoelectronics; Porosity; CMOS; Electronic engineering; Electrical engineering; Composite material; Voltage; Electrode; Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001445944,0.0001626529,0.0001805532,0.0001819968,0.0001209949,0.00042247,0.0006045316,0.0002542063,0.0004035498],"category_scores_gemma":[0.0002181668,0.0001343525,0.000290079,0.0001680282,0.000247612,0.0006589398,0.0002979386,0.0001886247,0.0002640482],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003442324,"about_ca_system_score_gemma":0.0001343255,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002293125,"about_ca_topic_score_gemma":0.0003186356,"domain_scores_codex":[0.9998828,0.000010128,0.000008882472,0.00002835893,0.00004982333,0.00001994839],"domain_scores_gemma":[0.9998575,0.00002779253,0.00005008695,0.00001800561,0.00003012283,0.0000164402],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005375942,0.00001404391,0.0002743806,0.00008035317,0.00001109056,0.0001177083,0.00002580301,0.0008133164,0.9913139,0.0008444089,0.00008905506,0.006362157],"study_design_scores_gemma":[0.00003104456,0.000251592,0.0006883633,0.000006130317,0.00003195088,0.0003929356,0.0000226906,0.01043191,0.9819385,0.0003327958,0.005853438,0.0000186661],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8689948,0.002964158,0.1176874,0.0003534202,0.0002160869,0.0000412021,0.0001012147,0.0009732525,0.008668518],"genre_scores_gemma":[0.9784124,0.0004330275,0.01930959,0.00003027193,0.00004140674,0.00001247966,0.00004015116,0.00002004957,0.001700504],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006045316,"threshold_uncertainty_score":0.002497613,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01371558130635081,"score_gpt":0.2056066231286229,"score_spread":0.1918910418222721,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}