{"id":"W2136267662","doi":"10.1109/tnano.2010.2081374","title":"A Novel Nanofabrication Damascene Lift-Off Technique","year":2010,"lang":"en","type":"article","venue":"IEEE Transactions on Nanotechnology","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Microscale chemistry; Nanolithography; Fabrication; Materials science; Reproducibility; Copper interconnect; Lift (data mining); Nanotechnology; Surface finish; Surface roughness; Etching (microfabrication); Optoelectronics; Computer science; Composite material; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001031508,0.0003114898,0.0002214132,0.0002781699,0.0003566628,0.000245077,0.0005795587,0.000391139,0.001328638],"category_scores_gemma":[0.0001452932,0.0002236559,0.0002109581,0.000168164,0.0002128159,0.0004427523,0.0004226583,0.0006954353,0.0008527848],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001810169,"about_ca_system_score_gemma":0.0002442,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002630441,"about_ca_topic_score_gemma":0.0007171028,"domain_scores_codex":[0.9997799,0.000005294052,0.000009785884,0.00003566225,0.0001456317,0.00002379967],"domain_scores_gemma":[0.9998991,0.00001957796,0.00003236972,0.00001837717,0.00001774327,0.00001273539],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00000883292,0.00001243835,0.00005636432,0.00005037732,0.000002076901,0.0001173158,0.00001863234,0.00004722237,0.9903717,0.0006172656,0.0003607261,0.008336878],"study_design_scores_gemma":[0.00002157827,0.0001240154,0.001480451,0.00001137351,0.00001246359,0.001737935,0.00001403295,0.001923273,0.952752,0.0003223528,0.04157354,0.00002694548],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.4551213,0.006206733,0.5036215,0.001213172,0.001267337,0.0003755033,0.0009030175,0.002999258,0.02829216],"genre_scores_gemma":[0.6270532,0.00319491,0.343399,0.000506893,0.0003151228,0.0003425377,0.0008667419,0.000213964,0.02410766],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.001328638,"threshold_uncertainty_score":0.004444778,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007119934528020284,"score_gpt":0.2201378267021185,"score_spread":0.2130178921740982,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}