{"id":"W2136337027","doi":"10.1116/1.2956627","title":"Synthesis of nanoscale CNx/TiAlN multilayered coatings by ion-beam-assisted deposition","year":2008,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University","funders":"","keywords":"Nanoindenter; Materials science; Nanocrystalline material; Microstructure; Auger electron spectroscopy; Amorphous solid; Nanoindentation; Ion beam-assisted deposition; Nanoscopic scale; Composite material; Deposition (geology); Metallurgy; Ion beam; Crystallography; Nanotechnology; Ion; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001168641,0.0004346257,0.0002958995,0.000235945,0.0001463725,0.0002281177,0.0002906099,0.000231813,0.0007458001],"category_scores_gemma":[0.0002002556,0.0003073812,0.0002025046,0.0001817632,0.0001208251,0.0002207604,0.0001755565,0.0002607616,0.0001927787],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005397003,"about_ca_system_score_gemma":0.000206367,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00165557,"about_ca_topic_score_gemma":0.003394976,"domain_scores_codex":[0.9999043,0.000003373145,0.000009283737,0.00002455758,0.00004114241,0.00001731874],"domain_scores_gemma":[0.9999076,0.00001005925,0.00003240607,0.0000113717,0.00002354367,0.00001492657],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000006681299,0.000002471314,0.00002195166,0.00001869768,0.000001995875,0.000006186314,0.000002419806,0.00005639349,0.9994677,0.00001236102,0.00001040852,0.0003927649],"study_design_scores_gemma":[0.000008461309,0.000064702,0.001128414,0.000002606941,0.00001108815,0.00003786711,0.000003862971,0.001280032,0.9966348,0.00000670822,0.0008182678,0.00000321743],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9861442,0.001147425,0.009869673,0.00005305489,0.00007224009,0.00008470405,0.0003210048,0.0001738278,0.002133791],"genre_scores_gemma":[0.972017,0.001110821,0.02367976,0.0000500319,0.00001900504,0.00007572646,0.0003383351,0.00004866789,0.002660559],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00165557,"threshold_uncertainty_score":0.003915846,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009406357318910803,"score_gpt":0.2048144141188649,"score_spread":0.1954080567999541,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}