{"id":"W2136410192","doi":"10.1149/1.2980005","title":"Two Step Annealing of Iridium Thin Films prepared by Plasma-Enhanced Atomic Layer Deposition","year":2008,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"Kootenay Association for Science & Technology","funders":"","keywords":"Iridium; Thin film; Materials science; Annealing (glass); Plasma; Argon; Atomic layer deposition; Analytical Chemistry (journal); Chemical engineering; Chemistry; Nanotechnology; Composite material; Catalysis","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004039461,0.0001243119,0.0001733639,0.0000515358,0.00009694502,0.00001522127,0.0000748751,0.00007002685,0.0003131947],"category_scores_gemma":[0.000001800285,0.0001320392,0.00006546047,0.0001044272,0.00002610558,0.000210526,0.000001662491,0.00008632723,0.00002359094],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002739381,"about_ca_system_score_gemma":0.00001468585,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001439737,"about_ca_topic_score_gemma":0.00004684204,"domain_scores_codex":[0.9993253,0.0000177957,0.0002553186,0.0001349188,0.0001048586,0.0001618503],"domain_scores_gemma":[0.9997011,0.00003269908,0.00003725903,0.0001488549,0.00002944201,0.00005058046],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001574583,0.00002342067,0.00001490091,0.00004784308,0.00004364636,0.00000120497,0.0006594582,0.04914971,0.9490921,0.000003600089,0.0008875626,0.00006074544],"study_design_scores_gemma":[0.0004308453,0.0000184724,0.00007853911,0.00003011456,0.00002822632,0.00001903719,0.000141962,0.03518716,0.9636171,0.000008064932,0.0002994002,0.0001410751],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9658708,0.0002917051,0.03148603,0.00000843239,0.0006278293,0.0001186586,0.000124125,0.0002705884,0.001201813],"genre_scores_gemma":[0.9973203,0.0001532389,0.002309927,0.00001137128,0.0000397823,0.00002512853,0.0000311508,0.00002973884,0.00007939113],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03144945,"threshold_uncertainty_score":0.5384401,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01383570381721618,"score_gpt":0.2223461764838386,"score_spread":0.2085104726666224,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}