{"id":"W2136755702","doi":"10.1109/ectc.1998.678698","title":"Thin film resistors and capacitors for multichip modules","year":2002,"lang":"en","type":"article","venue":"","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Tantalum nitride; Materials science; Capacitor; Plasma-enhanced chemical vapor deposition; Resistor; Tantalum capacitor; Wafer; Optoelectronics; Tantalum; Chemical vapor deposition; Silicon nitride; Thin film; Silicide; Silicon; Electrical engineering; Nanotechnology; Electrolytic capacitor; Metallurgy","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00030139,0.0005078664,0.0004341818,0.0008793842,0.0004757976,0.001207853,0.0009030165,0.001000104,0.04791215],"category_scores_gemma":[0.000639411,0.0004032345,0.000411328,0.001123074,0.0003923429,0.001415965,0.0006675909,0.001028348,0.02006455],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005232852,"about_ca_system_score_gemma":0.0003198534,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003789113,"about_ca_topic_score_gemma":0.0008512512,"domain_scores_codex":[0.9996485,0.00003440023,0.00001647295,0.00007365546,0.0001970159,0.0000300237],"domain_scores_gemma":[0.9997297,0.00004087821,0.00002891946,0.00007339486,0.00009627443,0.00003078883],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001244441,0.000089396,0.0004514237,0.001808628,0.00008089275,0.0007444021,0.0002161781,0.002473788,0.1969373,0.08158247,0.1234694,0.5920217],"study_design_scores_gemma":[0.00001933916,0.00009035711,0.0007394878,0.0001078605,0.00002762849,0.001158334,0.00004153354,0.002135859,0.04380045,0.01002753,0.9418145,0.00003701856],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"other","genre_gemma":"empirical","genre_scores_codex":[0.02811421,0.1339834,0.3233121,0.005281053,0.007920031,0.0007687881,0.003276495,0.01807121,0.4792728],"genre_scores_gemma":[0.1710276,0.04864623,0.2450422,0.001771761,0.001368957,0.0003971664,0.002592009,0.001540036,0.5276141],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.04791215,"threshold_uncertainty_score":0.1602821,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02413232609434295,"score_gpt":0.1984298922082985,"score_spread":0.1742975661139555,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}