{"id":"W2136776980","doi":"10.1109/cleoe.2003.1313619","title":"Nano-milling of diffractive optics by F/sub 2/-laser ablation","year":2005,"lang":"en","type":"article","venue":"","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Materials science; Optics; Etching (microfabrication); Laser ablation; Lithography; Ablation; Laser; Nano-; Diffraction; Photolithography; Optoelectronics; Optical materials; Nanotechnology; Physics; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001873421,0.0003154555,0.0003527176,0.0003011272,0.0002472961,0.0004453313,0.0003599914,0.0002832783,0.001735088],"category_scores_gemma":[0.0003933511,0.0003708961,0.0002462498,0.0001829167,0.000416594,0.0003268867,0.0003660282,0.0003825205,0.0006439565],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004492959,"about_ca_system_score_gemma":0.0002833785,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005565695,"about_ca_topic_score_gemma":0.001150743,"domain_scores_codex":[0.9997684,0.00001153433,0.0000132267,0.00004360814,0.000132101,0.00003119155],"domain_scores_gemma":[0.9997124,0.00008393305,0.00005804444,0.00007628422,0.00005288621,0.00001645271],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003460138,0.00001107097,0.0002240296,0.00004000432,0.000004626126,0.00004542712,0.00005427579,0.0004986261,0.9879444,0.0009820188,0.0002239236,0.009937054],"study_design_scores_gemma":[0.0000137702,0.00005350391,0.001248675,0.000004254176,0.000004052324,0.0001570453,0.0000177494,0.0031972,0.9890792,0.0003648116,0.005850155,0.00000961002],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8758972,0.001179114,0.1120805,0.000152891,0.0001716658,0.0000976341,0.0003262256,0.0008650582,0.009229722],"genre_scores_gemma":[0.7929818,0.0008635439,0.1931011,0.00009871311,0.00003200582,0.0001243653,0.0003968157,0.0001830251,0.01221853],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001735088,"threshold_uncertainty_score":0.005804479,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005934801339031162,"score_gpt":0.2078788809066543,"score_spread":0.2019440795676232,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}