{"id":"W2137284923","doi":"10.1016/j.tsf.2011.04.032","title":"Evolution of optical properties with deposition time of silicon nitride and diamond-like carbon films deposited by radio-frequency plasma-enhanced chemical vapor deposition method","year":2011,"lang":"en","type":"article","venue":"Thin Solid Films","topic":"Diamond and Carbon-based Materials Research","field":"Materials Science","cited_by":45,"is_retracted":false,"has_abstract":false,"ca_institutions":"Université du Québec en Outaouais","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Research Chairs; Ministère de l'Éducation, du Loisir et du Sport Québec","keywords":"Materials science; Refractive index; Thin film; Chemical vapor deposition; Carbon film; Silicon nitride; Deposition (geology); Plasma-enhanced chemical vapor deposition; Optoelectronics; Silicon; Combustion chemical vapor deposition; Diamond-like carbon; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006095471,0.0003048101,0.0005956673,0.0001353232,0.0000831053,0.00005360765,0.0002702028,0.000252518,0.0001544475],"category_scores_gemma":[0.00007432279,0.000241795,0.00007007064,0.000244807,0.0004279473,0.000296124,0.00009983685,0.0001771023,0.000009778267],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00007679766,"about_ca_system_score_gemma":0.0001315261,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001959349,"about_ca_topic_score_gemma":0.00001548495,"domain_scores_codex":[0.9975333,0.0002440116,0.0006429019,0.0005162139,0.0005844717,0.0004790822],"domain_scores_gemma":[0.998812,0.00008908416,0.0002987177,0.0003725704,0.0002361953,0.0001913938],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.001009438,0.0002654682,0.0002030076,0.0002516619,0.00003319799,0.00001053962,0.0006877873,0.00004575602,0.9972233,0.0000698995,0.00004016386,0.0001597596],"study_design_scores_gemma":[0.0009630323,0.0006993511,0.0004581955,0.0002553807,0.0001086866,0.00005039073,0.0001729623,0.009196267,0.9876489,0.0001538976,1.070106e-7,0.0002928275],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9953671,0.0003842921,0.002054429,0.00001273449,0.0001055828,0.000540951,0.00007261524,0.0001010193,0.001361249],"genre_scores_gemma":[0.9784429,0.00002632292,0.02124374,0.00001432091,0.00002971795,0.0001000021,0.0000514759,0.00004207896,0.00004944111],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01918931,"threshold_uncertainty_score":0.9860112,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01236613054373643,"score_gpt":0.2320296920505926,"score_spread":0.2196635615068562,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}