{"id":"W2137284923","doi":"10.1016/j.tsf.2011.04.032","title":"Evolution of optical properties with deposition time of silicon nitride and diamond-like carbon films deposited by radio-frequency plasma-enhanced chemical vapor deposition method","year":2011,"lang":"en","type":"article","venue":"Thin Solid Films","topic":"Diamond and Carbon-based Materials Research","field":"Materials Science","cited_by":45,"is_retracted":false,"has_abstract":false,"ca_institutions":"Université du Québec en Outaouais","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Research Chairs; Ministère de l'Éducation, du Loisir et du Sport Québec","keywords":"Materials science; Refractive index; Thin film; Chemical vapor deposition; Carbon film; Silicon nitride; Deposition (geology); Plasma-enhanced chemical vapor deposition; Optoelectronics; Silicon; Combustion chemical vapor deposition; Diamond-like carbon; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001430498,0.0002129452,0.0001443543,0.0002238915,0.0001786697,0.0002337386,0.0002693355,0.0003210216,0.001380083],"category_scores_gemma":[0.0004381654,0.0002402332,0.0001539216,0.0002213495,0.0001700975,0.0002400878,0.00007693328,0.000369386,0.0001800495],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002487905,"about_ca_system_score_gemma":0.0001326174,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001402174,"about_ca_topic_score_gemma":0.002075451,"domain_scores_codex":[0.9998838,0.000009197292,0.000005686414,0.00002842386,0.00004196181,0.00003096992],"domain_scores_gemma":[0.9996572,0.0001673416,0.00007223664,0.00002491278,0.00005299714,0.00002535244],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001027825,0.00001384173,0.0002532545,0.00002427403,0.000005600646,0.00004625983,0.00002340878,0.0001197592,0.9985972,0.00003372723,0.00004298936,0.0007370159],"study_design_scores_gemma":[0.00000570148,0.00008267816,0.003012065,0.000001893128,0.000006416567,0.00003676302,0.00001306683,0.001053955,0.9955455,0.00000789883,0.0002302359,0.000003811561],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9974807,0.0004836921,0.0005841746,0.00003367012,0.00001754008,0.00000426415,0.000149651,0.00003749437,0.00120879],"genre_scores_gemma":[0.9978168,0.0002446105,0.0006495936,0.00001328742,0.000006261735,0.000005656996,0.0001344934,0.0000151069,0.001114124],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001402174,"threshold_uncertainty_score":0.004616857,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01236613054373643,"score_gpt":0.2320296920505926,"score_spread":0.2196635615068562,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}