{"id":"W2137829981","doi":"10.1115/detc2010-28983","title":"Experimental Validation for an Extended-Stability Electrostatic Actuator","year":2010,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Actuator; Control theory (sociology); Cantilever; Voltage; Displacement (psychology); Beam (structure); Controller (irrigation); Feedback loop; Position (finance); Electrode; Materials science; Tracking (education); Physics; Computer science; Engineering; Optics; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001165969,0.0005203933,0.0003292767,0.0002438754,0.0005173516,0.000412369,0.001023215,0.00109362,0.002723688],"category_scores_gemma":[0.001816401,0.0001972367,0.0002439584,0.0001620855,0.0004004362,0.0005402268,0.0006536451,0.0004308925,0.0007909535],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002956209,"about_ca_system_score_gemma":0.0004849931,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005070004,"about_ca_topic_score_gemma":0.0005833171,"domain_scores_codex":[0.9991065,0.0001011913,0.00005865561,0.0001324166,0.0005158877,0.00008544359],"domain_scores_gemma":[0.9985812,0.0002805851,0.0001318801,0.0002370295,0.0006797607,0.00008959412],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002506489,0.0002104236,0.0007717951,0.0001781797,0.00001083548,0.0002104867,0.0001966835,0.004200009,0.9863244,0.0003669038,0.0003365807,0.00694309],"study_design_scores_gemma":[0.0001029321,0.003612746,0.004130714,0.00002812026,0.00001940813,0.0002617651,0.0001134159,0.03900444,0.9453203,0.0001319295,0.007238396,0.0000358459],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9138148,0.0002720575,0.07981829,0.0002811391,0.0001713121,0.0003881733,0.0005638107,0.001039894,0.003650443],"genre_scores_gemma":[0.97526,0.0001074039,0.02103556,0.00005293356,0.00001514973,0.0002868961,0.000247365,0.00004436067,0.002950454],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002723688,"threshold_uncertainty_score":0.009111643,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01724633973214384,"score_gpt":0.2819428577830848,"score_spread":0.2646965180509409,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}