{"id":"W2138167127","doi":"10.1117/12.746990","title":"Bimetallic thermal resists potential for double-exposure immersion lithography and grayscale photomasks","year":2007,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Resist; Photomask; Materials science; Immersion lithography; Lithography; Optics; Laser; Optoelectronics; Photolithography; Interference lithography; Electron-beam lithography; Next-generation lithography; Maskless lithography; Nanotechnology; Fabrication","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0007279966,0.0004032473,0.0004257219,0.0002458822,0.0001126083,0.00008862086,0.000675201,0.0002672787,0.000006533626],"category_scores_gemma":[0.00007014928,0.0003583582,0.000725322,0.0004263948,0.0002881843,0.0005218752,0.0001216885,0.0003008453,2.598425e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000947474,"about_ca_system_score_gemma":0.00001142786,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000004562984,"about_ca_topic_score_gemma":1.685648e-7,"domain_scores_codex":[0.9977527,1.20038e-8,0.0007337318,0.000403934,0.000552939,0.000556669],"domain_scores_gemma":[0.9985797,0.0001254907,0.0002356365,0.00007719738,0.0008294751,0.0001524691],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003561888,0.00009487064,0.0007613177,0.0009271812,0.0005898823,1.833366e-7,0.0001388987,0.0001137965,0.8827202,0.1122992,0.0009487316,0.001049522],"study_design_scores_gemma":[0.00315014,0.0006634558,0.003939688,0.0004489347,0.0003699734,0.00002770293,0.001020784,0.0132475,0.9669734,0.002583106,0.006752835,0.0008225064],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.994795,0.0005214292,0.001216075,0.0001714977,0.0002974597,0.001108034,0.00006392107,0.000294143,0.001532433],"genre_scores_gemma":[0.7577575,0.0003160533,0.2411609,0.00003884856,0.0002933322,0.0002576831,0.00001413796,0.0001076944,0.00005390694],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2399448,"threshold_uncertainty_score":0.9998868,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008019361538918742,"score_gpt":0.2325612837845747,"score_spread":0.224541922245656,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}