{"id":"W2138639801","doi":"10.1109/vlsic.2003.1221154","title":"Very wide tuning range micro-electromechanical capacitors in the MUMPs process for RF applications","year":2004,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":18,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University","funders":"","keywords":"Capacitor; Materials science; Optoelectronics; Process (computing); Range (aeronautics); Electrical engineering; Electronic engineering; Engineering physics; Computer science; Voltage; Engineering; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00020004,0.0002471379,0.0002127396,0.0001991241,0.0003203609,0.0003187201,0.0005586974,0.000449044,0.001944753],"category_scores_gemma":[0.0003732802,0.000247817,0.0001700416,0.000255285,0.0002283103,0.0005200127,0.0003062419,0.0005323681,0.0009516408],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003690951,"about_ca_system_score_gemma":0.000390156,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006001284,"about_ca_topic_score_gemma":0.001618877,"domain_scores_codex":[0.9998085,0.0000144286,0.000006783373,0.00003702789,0.0001103409,0.00002286521],"domain_scores_gemma":[0.9998671,0.00003314721,0.00002667462,0.00002405688,0.00003075907,0.000018255],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005500268,0.000008703501,0.000123911,0.00006407674,0.00000928295,0.00009910704,0.00003518399,0.0004822996,0.9840607,0.003343898,0.0008108279,0.01090699],"study_design_scores_gemma":[0.00007386073,0.0003585468,0.002608214,0.00002267345,0.00004177862,0.001175444,0.00004325714,0.006436951,0.9426594,0.001868596,0.04467597,0.00003528862],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7109347,0.008504903,0.2334608,0.002220683,0.0007823998,0.00019789,0.0006132232,0.004252944,0.03903236],"genre_scores_gemma":[0.8696253,0.0008176898,0.1180456,0.0002710263,0.0001448138,0.00009662072,0.000271427,0.0000988543,0.01062861],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001944753,"threshold_uncertainty_score":0.006505847,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01379550349484758,"score_gpt":0.2478878057634239,"score_spread":0.2340923022685763,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}