{"id":"W2138708950","doi":"10.1149/1.3206616","title":"Structure of Hafnium Silicate Films Formed by Atomic Layer Deposition","year":2009,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Semiconductor materials and interfaces","field":"Physics and Astronomy","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institute for Microstructural Sciences; National Research Council Canada; Western University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"High-resolution transmission electron microscopy; Materials science; X-ray photoelectron spectroscopy; Silicate; Transmission electron microscopy; Spinodal decomposition; Analytical Chemistry (journal); Scattering; Hafnium; Atomic layer deposition; Annealing (glass); Layer (electronics); Chemistry; Nanotechnology; Optics; Chemical engineering; Composite material; Phase (matter); Metallurgy","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.00001317435,0.00009385768,0.0001251022,0.00002488666,0.00006613554,0.00002238885,0.00007349034,0.00003755309,0.002867222],"category_scores_gemma":[2.588106e-7,0.00008417732,0.00006861227,0.00005558109,0.00001912878,0.0001553888,0.000001091522,0.00007350535,0.00001148649],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000007633359,"about_ca_system_score_gemma":0.00001246425,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001139228,"about_ca_topic_score_gemma":0.00000354339,"domain_scores_codex":[0.9995252,0.00001200853,0.000165203,0.0001159266,0.0000587671,0.000122827],"domain_scores_gemma":[0.9997543,0.00000867475,0.00005949377,0.0001160145,0.00002564554,0.00003587513],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001270386,0.00005434657,0.00006982125,0.000003753472,0.00002655588,3.301801e-8,0.0001238277,0.00008396253,0.9970841,0.0002405516,0.001229377,0.001070946],"study_design_scores_gemma":[0.0002320338,0.00004822283,0.0005018499,0.00001012801,0.00003036798,8.790434e-7,0.000103176,0.0001445901,0.9966865,0.001557993,0.000595459,0.00008877829],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9844604,0.00003959549,0.01357868,0.0001140964,0.0001770536,0.00009335435,0.0003862653,0.00002305151,0.001127542],"genre_scores_gemma":[0.9993436,0.00000303314,0.0003032068,0.0000335315,0.00004474551,0.000003335166,0.00006103731,0.000007815498,0.0001996572],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01488328,"threshold_uncertainty_score":0.9980443,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008021511444413688,"score_gpt":0.2337238734390621,"score_spread":0.2257023619946484,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}