{"id":"W2138943661","doi":"10.1109/iscas.2001.921060","title":"A MEMS implementation of an acoustical sensor array","year":2002,"lang":"en","type":"article","venue":"","topic":"Acoustic Wave Resonator Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor","funders":"","keywords":"Microelectromechanical systems; Capacitive sensing; Diaphragm (acoustics); Materials science; Planar array; Planar; Acoustics; Capacitance; Microphone; Beam (structure); Electrical engineering; Sensor array; Optoelectronics; Engineering; Computer science; Optics; Vibration; Physics; Sound pressure; Telecommunications; Electrode","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001767178,0.0003582421,0.000301685,0.0002563235,0.0002633756,0.0004482575,0.0008562078,0.0006145703,0.004163041],"category_scores_gemma":[0.0004044688,0.0002420025,0.0001889473,0.0002363931,0.0002191169,0.0004571076,0.0003422349,0.0004455636,0.002530412],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002992164,"about_ca_system_score_gemma":0.000302827,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004292938,"about_ca_topic_score_gemma":0.0006972008,"domain_scores_codex":[0.9995204,0.00004489566,0.00001580771,0.0000828851,0.0002888371,0.00004718748],"domain_scores_gemma":[0.9996961,0.00004139767,0.00002715117,0.00003092245,0.0001788931,0.00002551814],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008318279,0.00005750271,0.0003865355,0.0001393836,0.00002435201,0.0001785718,0.00004629731,0.001335259,0.9127675,0.004708464,0.003415436,0.07685748],"study_design_scores_gemma":[0.00004534566,0.0007375451,0.002142468,0.00003691794,0.00005394496,0.0009784513,0.00004778274,0.03143782,0.8365525,0.001162409,0.1267426,0.00006214387],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1444271,0.00254844,0.7493387,0.001617742,0.00217277,0.0004262245,0.0007953458,0.005898916,0.09277467],"genre_scores_gemma":[0.3782805,0.001427472,0.5763763,0.0006884325,0.0004100002,0.0003135286,0.0003604874,0.000113515,0.0420297],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.004163041,"threshold_uncertainty_score":0.01392668,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01673794992419432,"score_gpt":0.2544118831440654,"score_spread":0.2376739332198711,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}